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Ohkug Kwon
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Yongin-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Apparatus for generating extreme ultraviolet light and lithography...
Patent number
11,720,027
Issue date
Aug 8, 2023
Samsung Electronics Co., Ltd.
Injae Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR FABRICATION APPARATUS
Publication number
20230251576
Publication date
Aug 10, 2023
Samsung Electronics Co., Ltd.
OHKUG KWON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND LITHOGRAPHY...
Publication number
20220082946
Publication date
Mar 17, 2022
Samsung Electronics Co., Ltd.
Injae Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY