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Oktawian Sobieraj
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Ballston Lake, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Pellicle replacement in EUV mask flow
Patent number
10,401,724
Issue date
Sep 3, 2019
GLOBALFOUNDRIES Inc.
Oktawian Sobieraj
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PHOTOLITHOGRAPHY SYSTEM AND METHOD INCORPORATING A PHOTOMASK-PELLIC...
Publication number
20190258157
Publication date
Aug 22, 2019
GLOBALFOUNDRIES INC.
Yulu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE REPLACEMENT IN EUV MASK FLOW
Publication number
20190137863
Publication date
May 9, 2019
GLOBALFOUNDRIES INC.
Oktawian Sobieraj
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY