TREA

Olaf Bork

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  • Aalen, DE
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Patents Grantslast 30 patents

  • Information Patent Grant

    Removing reflective layers from EUV mirrors
    • Patent number 7,919,004
    • Issue date Apr 5, 2011
    • Carl Zeiss SMT GmbH
    • Martin Weiser
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    REMOVING REFLECTIVE LAYERS FROM EUV MIRRORS
    • Publication number 20100027106
    • Publication date Feb 4, 2010
    • Carl Zeiss SMT AG
    • Martin WEISER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...