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Olaf Hubertus Wilhelmus Van Bruggen
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Schijndel, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus and position sensor
Patent number
7,830,495
Issue date
Nov 9, 2010
ASML Netherlands B.V.
Olaf Hubertus Wilhelmus Van Bruggen
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus and position sensor
Publication number
20090015246
Publication date
Jan 15, 2009
ASML NETHERLANDS B.V.
Olaf Hubertus Wilhelmus Van Bruggen
G01 - MEASURING TESTING