Olaf Kuehn

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method of determining the endpoint of a planarization process
- Patent number 6,932,674
- Issue date Aug 23, 2005
- Infineon Technologies Aktientgesellschaft
- Peter Lahnor
- B24 - GRINDING POLISHING
Information Patent Grant
Method of planarizing substrates
- Patent number 6,827,635
- Issue date Dec 7, 2004
- Infineon Technologies Aktiengesellschaft
- Peter Lahnor
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PLANARIZING SUBSTRATES
- Publication number 20040185756
- Publication date Sep 23, 2004
- Peter Lahnor
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF DETERMINING THE ENDPOINT OF A PLANARIZATION PROCESS
- Publication number 20040176015
- Publication date Sep 9, 2004
- Peter Lahnor
- B24 - GRINDING POLISHING