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Olaf Stenzel
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Bucha, DE
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last 30 patents
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Patent Grant
Electrostatic chuck with anti-reflective coating, measuring method...
Patent number
8,081,317
Issue date
Dec 20, 2011
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Gerhard Kalkowski
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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last 30 patents
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Optical Coating and Method for Producing an Optical Coating with Re...
Publication number
20190086580
Publication date
Mar 21, 2019
Fraunhofer-Gesellschaft zur Förderug der angewandten Forschung e.V.
Alexander von Finck
G02 - OPTICS
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Patent Application
ELECTROSTATICE CHUCK WITH ANTI-REFLECTIVE COATING, MEASURING METHOD...
Publication number
20100046005
Publication date
Feb 25, 2010
Fraunhofer-Gesellschaft zur Förderung der angewand ten Forschung e.V.
Gerhard Kalkowski
G01 - MEASURING TESTING
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Patent Application
Electrostatic Chuck With Anti-Reflective Coating, Measuring Method...
Publication number
20090279101
Publication date
Nov 12, 2009
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Gerhard Kalkowski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY