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Patents Grants
last 30 patents
Information
Patent Grant
Sealing device, component and lithography apparatus
Patent number
11,740,562
Issue date
Aug 29, 2023
Carl Zeiss SMT GmbH
Dieter Bader
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Optical element and method
Patent number
8,891,172
Issue date
Nov 18, 2014
Carl Zeiss SMT GmbH
Eric Eva
G02 - OPTICS
Information
Patent Grant
Optical element and method
Patent number
8,508,854
Issue date
Aug 13, 2013
Carl Zeiss SMT GmbH
Eric Eva
G02 - OPTICS
Information
Patent Grant
Optical correction device
Patent number
8,325,322
Issue date
Dec 4, 2012
Carl Zeiss SMT GmbH
Markus Hauf
G02 - OPTICS
Information
Patent Grant
Optical assembly, projection exposure apparatus and projection obje...
Patent number
7,768,721
Issue date
Aug 3, 2010
Carl Zeiss SMT AG
Jochen Weber
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
SEALING DEVICE, COMPONENT AND LITHOGRAPHY APPARATUS
Publication number
20220019150
Publication date
Jan 20, 2022
Carl Zeiss SMT GMBH
Dieter Bader
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
OPTICAL ELEMENT AND METHOD
Publication number
20110080569
Publication date
Apr 7, 2011
Carl Zeiss SMT GMBH
Eric Eva
G02 - OPTICS
Information
Patent Application
OPTICAL CORRECTION DEVICE
Publication number
20100201958
Publication date
Aug 12, 2010
Carl Zeiss SMT AG
Markus Hauf
G02 - OPTICS
Information
Patent Application
OPTICAL ELEMENT AND METHOD
Publication number
20090257032
Publication date
Oct 15, 2009
Carl Zeiss SMT AG
Eric Eva
G02 - OPTICS
Information
Patent Application
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJE...
Publication number
20080316621
Publication date
Dec 25, 2008
Jochen Weber
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and method for adjusting a position of an eyeglass lens rela...
Publication number
20060044509
Publication date
Mar 2, 2006
Ole Fluegge
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE