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Ole Waldmann
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Oakland, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Reducing temperature transition in a substrate support
Patent number
10,096,506
Issue date
Oct 9, 2018
Lam Research Corporation
Tao Zhang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method for reducing temperature transition in an electrostatic chuck
Patent number
9,922,855
Issue date
Mar 20, 2018
Lam Research Corporation
Tao Zhang
G05 - CONTROLLING REGULATING
Information
Patent Grant
System and method for reducing temperature transition in an electro...
Patent number
9,779,974
Issue date
Oct 3, 2017
Lam Research Corporation
Tao Zhang
G05 - CONTROLLING REGULATING
Information
Patent Grant
Auto-correction of malfunctioning thermal control element in a temp...
Patent number
9,543,171
Issue date
Jan 10, 2017
Lam Research Corporation
Ole Waldmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calculating power input to an array of thermal control elements to...
Patent number
9,435,692
Issue date
Sep 6, 2016
Lam Research Corporation
Ole Waldmann
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
REDUCING TEMPERATURE TRANSITION IN A SUBSTRATE SUPPORT
Publication number
20180174879
Publication date
Jun 21, 2018
LAM RESEARCH CORPORATION
Tao Zhang
G05 - CONTROLLING REGULATING
Information
Patent Application
METHOD FOR REDUCING TEMPERATURE TRANSITION IN AN ELECTROSTATIC CHUCK
Publication number
20180005859
Publication date
Jan 4, 2018
LAM RESEARCH CORPORATION
Tao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR REDUCING TEMPERATURE TRANSITION IN AN ELECTRO...
Publication number
20160372355
Publication date
Dec 22, 2016
LAM RESEARCH CORPORATION
Tao Zhang
G01 - MEASURING TESTING
Information
Patent Application
AUTO-CORRECTION OF MALFUNCTIONING THERMAL CONTROL ELEMENT IN A TEMP...
Publication number
20150364388
Publication date
Dec 17, 2015
LAM RESEARCH CORPORATION
Ole Waldmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALCULATING POWER INPUT TO AN ARRAY OF THERMAL CONTROL ELEMENTS TO...
Publication number
20150219499
Publication date
Aug 6, 2015
LAM RESEARCH CORPORATION
Ole Waldmann
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF DETERMINING THERMAL STABILITY OF A SUBSTRATE SUPPORT ASSE...
Publication number
20150168962
Publication date
Jun 18, 2015
LAM RESEARCH CORPORATION
Ole Waldmann
G05 - CONTROLLING REGULATING