Oleg Feliksovich Yakushev

Person

Korolyev, RU

People

Patents Grantslast 30 patents

Information Patent Grant
X-ray source with rotating liquid-metal target
- Patent number 11,869,742
- Issue date Jan 9, 2024
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Short-wavelength radiation source with multisectional collector mod...
- Patent number 11,252,810
- Issue date Feb 15, 2022
- Isteq B.V.
- Vladimir Vitalievich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High brightness laser-produced plasma light source
- Patent number 10,887,973
- Issue date Jan 5, 2021
- Isteq B.V.
- Vladimir Vitalievich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compact wideband VUV spectrometer
- Patent number 10,753,798
- Issue date Aug 25, 2020
- RnD-ISAN, Ltd
- Dmitriy Borisovich Abramenko
- G01 - MEASURING TESTING
Information Patent Grant
High-brightness laser produced plasma source and methods for genera...
- Patent number 10,638,588
- Issue date Apr 28, 2020
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High brightness short-wavelength radiation source (variants)
- Patent number 10,588,210
- Issue date Mar 10, 2020
- Isteq B.V.
- Aleksandr Yurievich Vinokhodov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High-brightness LPP EUV light source
- Patent number 9,476,841
- Issue date Oct 25, 2016
- OOO “Isteq B.V.”
- Pavel Stanislavovich Antsiferov
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus
- Patent number 9,307,624
- Issue date Apr 5, 2016
- ASML Netherlands B.V.
- Denis Alexandrovich Glushkov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 8,294,128
- Issue date Oct 23, 2012
- ASML Netherlands B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus with plasma radiation source and method of forming a beam...
- Patent number 7,825,390
- Issue date Nov 2, 2010
- ASML Netherlands B.V.
- Vladimir Mihallovitch Krivtsun
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND...
- Publication number 20240121878
- Publication date Apr 11, 2024
- ISTEQ GROUP HOLDING B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET
- Publication number 20220310351
- Publication date Sep 29, 2022
- EUV LABS, LTD
- Aleksandr Yurievich VINOKHODOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MOD...
- Publication number 20210092824
- Publication date Mar 25, 2021
- Isteq B.V.
- Vladimir Vitalievich IVANOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMPACT WIDEBAND VUV SPECTROMETER
- Publication number 20200173853
- Publication date Jun 4, 2020
- RND-ISAN, LTD
- Dmitriy Borisovich ABRAMENKO
- G01 - MEASURING TESTING
Information Patent Application
HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE
- Publication number 20200163197
- Publication date May 21, 2020
- Isteq B.V.
- Vladimir Vitalievich IVANOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH BRIGHTNESS SHORT-WAVELENGTH RADIATION SOURCE (VARIANTS)
- Publication number 20200060014
- Publication date Feb 20, 2020
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...
- Publication number 20190166679
- Publication date May 30, 2019
- Isteq B.V.
- Aleksandr Yurievich VINOKHODOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM...
- Publication number 20110013167
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch KRIVTSUN
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20100002211
- Publication date Jan 7, 2010
- ASML NETHERLANDS B.V.
- Denis GLUSHKOV
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus with plasma radiation source and method of forming a beam...
- Publication number 20080192218
- Publication date Aug 14, 2008
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitch Krivtsun
- B82 - NANO-TECHNOLOGY

Oleg Feliksovich Yakushev

Person

Patents Grantslast 30 patents

X-ray source with rotating liquid-metal target

Short-wavelength radiation source with multisectional collector mod...

High brightness laser-produced plasma light source

Compact wideband VUV spectrometer

High-brightness laser produced plasma source and methods for genera...

High brightness short-wavelength radiation source (variants)

High-brightness LPP EUV light source

Lithographic apparatus

Apparatus with plasma radiation source and method of forming a beam...

Apparatus with plasma radiation source and method of forming a beam...

Patents Applicationslast 30 patents

HIGH BRIGHTNESS LPP EUV LIGHT SOURCE WITH FAST ROTATING TARGET AND...

X-RAY SOURCE WITH ROTATING LIQUID-METAL TARGET

SHORT-WAVELENGTH RADIATION SOURCE WITH MULTISECTIONAL COLLECTOR MOD...

COMPACT WIDEBAND VUV SPECTROMETER

HIGH BRIGHTNESS LASER-PRODUCED PLASMA LIGHT SOURCE

HIGH BRIGHTNESS SHORT-WAVELENGTH RADIATION SOURCE (VARIANTS)

HIGH-BRIGHTNESS LASER PRODUCED PLASMA SOURCE AND METHODS FOR GENERA...

APPARATUS WITH PLASMA RADIATION SOURCE AND METHOD OF FORMING A BEAM...

LITHOGRAPHIC APPARATUS

Apparatus with plasma radiation source and method of forming a beam...