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Oleg Khodykin
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San Diego, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Laser-sustained plasma lamps with graded concentration of hydroxyl...
Patent number
11,887,835
Issue date
Jan 30, 2024
KLA Corporation
Oleg Khodykin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for combined reflectometry and photoelectron sp...
Patent number
11,536,674
Issue date
Dec 27, 2022
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
Laser produced plasma light source having a target material coated...
Patent number
11,419,202
Issue date
Aug 16, 2022
KLA Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet generation for a laser produced plasma light source
Patent number
11,343,899
Issue date
May 24, 2022
KLA Corporation
Brian Ahr
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Methods and systems for semiconductor metrology based on polychroma...
Patent number
11,333,621
Issue date
May 17, 2022
KLA-Tencor Corporation
Daniel Wack
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bright and clean x-ray source for x-ray based metrology
Patent number
11,317,500
Issue date
Apr 26, 2022
KLA-Tencor Corporation
Oleg Khodykin
G01 - MEASURING TESTING
Information
Patent Grant
System and method for x-ray imaging and classification of volume de...
Patent number
11,035,804
Issue date
Jun 15, 2021
KLA Corporation
Richard W. Solarz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
X-ray metrology system with broadband laser produced plasma illumin...
Patent number
10,959,318
Issue date
Mar 23, 2021
KLA-Tencor Corporation
Oleg Khodykin
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for combined x-ray reflectometry and photoelect...
Patent number
10,895,541
Issue date
Jan 19, 2021
KLA-Tencor Corporation
Andrei V. Shchegrov
G02 - OPTICS
Information
Patent Grant
Laser produced plasma light source having a target material coated...
Patent number
10,893,599
Issue date
Jan 12, 2021
KLA Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Droplet generation for a laser produced plasma light source
Patent number
10,880,979
Issue date
Dec 29, 2020
KLA Corporation
Brian Ahr
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
High power broadband illumination source
Patent number
10,806,016
Issue date
Oct 13, 2020
KLA Corporation
Oleg Khodykin
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Apparatus and methods for optics protection from debris in plasma-b...
Patent number
10,101,664
Issue date
Oct 16, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plasma-based light source
Patent number
10,034,362
Issue date
Jul 24, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser produced plasma light source having a target material coated...
Patent number
10,021,773
Issue date
Jul 10, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Debris protection system for reflective optic utilizing gas flow
Patent number
9,989,758
Issue date
Jun 5, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plasma based light source having a target material coated on a cyli...
Patent number
9,918,375
Issue date
Mar 13, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
G02 - OPTICS
Information
Patent Grant
System and method for generation of extreme ultraviolet light
Patent number
9,544,984
Issue date
Jan 10, 2017
KLA-Tencor Corporation
Alexander Bykanov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for producing an exclusionary buffer gas flow in...
Patent number
9,420,678
Issue date
Aug 16, 2016
KLA-Tencor Corporation
Alexander Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV light source using cryogenic droplet targets in mask inspection
Patent number
9,295,147
Issue date
Mar 22, 2016
KLA-Tencor Corporation
Alexander Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Phase grating for mask inspection system
Patent number
9,151,881
Issue date
Oct 6, 2015
KLA-Tencor Corporation
Daimian Wang
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PULSE-ASSISTED LASER-SUSTAINED PLASMA IN FLOWING HIGH-PRESSURE LIQUIDS
Publication number
20240105440
Publication date
Mar 28, 2024
KLA Corporation
Ilya Bezel
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER-SUSTAINED PLASMA LAMPS WITH GRADED CONCENTRATION OF HYDROXYL...
Publication number
20230046314
Publication date
Feb 16, 2023
KLA Corporation
Oleg Khodykin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
Publication number
20210136903
Publication date
May 6, 2021
KLA Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
DROPLET GENERATION FOR A LASER PRODUCED PLASMA LIGHT SOURCE
Publication number
20210105886
Publication date
Apr 8, 2021
KLA Corporation
Brian Ahr
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems And Methods For Combined Reflectometry And Photoelectron Sp...
Publication number
20210055237
Publication date
Feb 25, 2021
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Application
Systems And Methods For Combined X-Ray Reflectometry And Photoelect...
Publication number
20190212281
Publication date
Jul 11, 2019
KLA-Tencor Corporation
Andrei V. Shchegrov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
X-Ray Metrology System With Broadband Laser Produced Plasma Illumin...
Publication number
20190215940
Publication date
Jul 11, 2019
KLA-Tencor Corporation
Oleg Khodykin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
Publication number
20190075641
Publication date
Mar 7, 2019
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Bright And Clean X-Ray Source For X-Ray Based Metrology
Publication number
20190069385
Publication date
Feb 28, 2019
KLA-Tencor Corporation
Oleg Khodykin
G01 - MEASURING TESTING
Information
Patent Application
High Power Broadband Illumination Source
Publication number
20190037676
Publication date
Jan 31, 2019
KLA-Tencor Corporation
Oleg Khodykin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Methods And Systems For Semiconductor Metrology Based On Polychroma...
Publication number
20190017946
Publication date
Jan 17, 2019
KLA-Tencor Corporation
Daniel Wack
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for X-Ray Imaging and Classification of Volume De...
Publication number
20190003988
Publication date
Jan 3, 2019
KLA-Tencor Corporation
Richard W. Solarz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Plasma Based Light Source Having a Target Material Coated on a Cyli...
Publication number
20170142818
Publication date
May 18, 2017
KLA-Tencor Corporation
Alexey Kuritsyn
G02 - OPTICS
Information
Patent Application
Laser Produced Plasma Light Source Having a Target Material Coated...
Publication number
20170142817
Publication date
May 18, 2017
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Droplet Generation for a Laser Produced Plasma Light Source
Publication number
20170131129
Publication date
May 11, 2017
KLA-Tencor Corporation
Brian Ahr
G01 - MEASURING TESTING
Information
Patent Application
Plasma-Based Light Source
Publication number
20160249442
Publication date
Aug 25, 2016
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHODS FOR OPTICS PROTECTION FROM DEBRIS IN PLASMA-B...
Publication number
20160128171
Publication date
May 5, 2016
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
System and Method for Generation of Extreme Ultraviolet Light
Publication number
20150076359
Publication date
Mar 19, 2015
KLA-Tencor Corporation
Alexander Bykanov
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR PRODUCING AN EXCLUSIONARY BUFFER GAS FLOW IN...
Publication number
20150008335
Publication date
Jan 8, 2015
KLA-Tencor Corporation
Alexander Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Debris Protection System For Reflective Optic Utilizing Gas Flow
Publication number
20140306115
Publication date
Oct 16, 2014
KLA-Tencor Corporation
Alexey Kuritsyn
G02 - OPTICS
Information
Patent Application
Phase Grating For Mask Inspection System
Publication number
20140131586
Publication date
May 15, 2014
KLA-Tencor Corporation
Daimian Wang
G02 - OPTICS