Oleg Khodykin

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San Diego, CA

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Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT SOURCE USING CRYOGENIC DROPLET TARGETS IN MASK INSPECTION
- Publication number 20140246607
- Publication date Sep 4, 2014
- KLA-Tencor Corporation
- Alexander Bykanov
- H01 - BASIC ELECTRIC ELEMENTS