Oleksandr MIKHNENKO

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20250069866
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Changyou JING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MOUNTING WIRES TO SUBSTRATE SUPPORT CERAMIC
- Publication number 20230253192
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Oleksandr MIKHNENKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20220277928
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Changyou JING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK SYSTEM
- Publication number 20220181127
- Publication date Jun 9, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HEATER RESISTANCE MEASUREMENT TO APPROXIMATE TE...
- Publication number 20220172925
- Publication date Jun 2, 2022
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH POWDER COATING
- Publication number 20220130705
- Publication date Apr 28, 2022
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Oleksandr MIKHNENKO

Person

Patents Grantslast 30 patents

In situ real-time sensing and compensation of non-uniformities in s...

Patents Applicationslast 30 patents

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

METHOD OF MOUNTING WIRES TO SUBSTRATE SUPPORT CERAMIC

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

ELECTROSTATIC CHUCK SYSTEM

ELECTROSTATIC CHUCK HEATER RESISTANCE MEASUREMENT TO APPROXIMATE TE...

ELECTROSTATIC CHUCK WITH POWDER COATING