Oliver Ache

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Leun, DE

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Patents Grantslast 30 patents

Information Patent Grant
Target and algorithm to measure overlay by modeling back scattering...
- Patent number 12,100,574
- Issue date Sep 24, 2024
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring positions of structures on a substrate and com...
- Patent number 10,337,852
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Oliver Ache
- G01 - MEASURING TESTING
Information Patent Grant
Method for correcting position measurements for optical errors and...
- Patent number 9,704,238
- Issue date Jul 11, 2017
- KLA-Tencor Corporation
- Stefan Eyring
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for correcting position measurements for optical errors and...
- Patent number 9,201,312
- Issue date Dec 1, 2015
- KLA-Tencor Corporation
- Stefan Eyring
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TARGET AND ALGORITHM TO MEASURE OVERLAY BY MODELING BACK SCATTERING...
- Publication number 20220005668
- Publication date Jan 6, 2022
- KLA Corporation
- Nadav Gutman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MEASURING POSITIONS OF STRUCTURES ON A SUBSTRATE AND COM...
- Publication number 20190186893
- Publication date Jun 20, 2019
- KLA-Tencor Corporation
- Oliver Ache
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CORRECTING POSITION MEASUREMENTS FOR OPTICAL ERRORS AND...
- Publication number 20160078609
- Publication date Mar 17, 2016
- KLA-Tencor Corporation
- Stefan Eyring
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CORRECTING POSITION MEASUREMENTS FOR OPTICAL ERRORS AND...
- Publication number 20140307949
- Publication date Oct 16, 2014
- Stefan Eyring
- G06 - COMPUTING CALCULATING COUNTING