Oliver Fagerer

Follow

Person

Dietramszell, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Photomask, in particular alternating phase shift mask, with compens...
- Patent number 7,063,921
- Issue date Jun 20, 2006
- Infineon Technologies AG
- Wolfgang Dettman
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
Photomask, in particular alternating phase shift mask, with compens...
- Publication number 20040115442
- Publication date Jun 17, 2004
- Wolfgang Dettman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY