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Oliver Genz
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Optical measurement system and method
Patent number
7,046,363
Issue date
May 16, 2006
Infineon Technologies AG
Alexander Michaelis
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for patterning a semiconductor wafer
Patent number
6,809,800
Issue date
Oct 26, 2004
Infineon Technologies AG
Oliver Genz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for patterning a semiconductor wafer
Patent number
6,558,883
Issue date
May 6, 2003
Infineon Technologies AG
Oliver Genz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Optical measurement system and method
Publication number
20040046958
Publication date
Mar 11, 2004
Infineon Technologies AG
Alexander Michaelis
G01 - MEASURING TESTING
Information
Patent Application
Apparatus for patterning a semiconductor wafer
Publication number
20030218727
Publication date
Nov 27, 2003
Oliver Genz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and method for patterning a semiconductor wafer
Publication number
20020127501
Publication date
Sep 12, 2002
Oliver Genz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY