Oliver Herbst

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Drive device, optical system and lithography apparatus
- Patent number 12,153,353
- Issue date Nov 26, 2024
- Carl Zeiss SMT GmbH
- Oliver Herbst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20250180998
- Publication date Jun 5, 2025
- Carl Zeiss SMT GMBH
- Oliver HERBST
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20250015772
- Publication date Jan 9, 2025
- Carl Zeiss SMT GMBH
- Cornelius Richt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
- Publication number 20230051439
- Publication date Feb 16, 2023
- Carl Zeiss SMT GMBH
- Oliver Herbst
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY