Oliver Jaeckel

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Device for measuring a substrate and method for correcting cyclic e...
- Patent number 12,135,211
- Issue date Nov 5, 2024
- Carl Zeiss SMT GmbH
- Stephan Zschaeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for measuring a substrate for semiconductor lithography
- Patent number 11,880,145
- Issue date Jan 23, 2024
- Carl Zeiss SMT GmbH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for capturing and compensating ambient effects in a measurin...
- Patent number 10,585,274
- Issue date Mar 10, 2020
- Carl Zeiss SMT GmbH
- Dirk Seidel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MEASURING A SUBSTRATE FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20230136478
- Publication date May 4, 2023
- Carl Zeiss SMT GMBH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR MEASURING A SUBSTRATE AND METHOD FOR CORRECTING CYCLIC E...
- Publication number 20220260359
- Publication date Aug 18, 2022
- Carl Zeiss SMT GMBH
- Stephan Zschaeck
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CAPTURING AND COMPENSATING AMBIENT EFFECTS IN A MEASURIN...
- Publication number 20190011690
- Publication date Jan 10, 2019
- Carl Zeiss SMT GMBH
- Dirk Seidel
- G01 - MEASURING TESTING