Oliver Jäckel

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method, apparatus and computer program for analyzing and/or process...
- Patent number 12,105,415
- Issue date Oct 1, 2024
- Carl Zeiss SMT GmbH
- Oliver Jäckel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring microscope for measuring masks for lithographic methods a...
- Patent number 11,079,586
- Issue date Aug 3, 2021
- Carl Zeiss SMT GmbH
- Oliver Jäckel
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD, APPARATUS AND COMPUTER PROGRAM FOR ANALYZING AND/OR PROCESS...
- Publication number 20220050389
- Publication date Feb 17, 2022
- Carl Zeiss SMT GMBH
- Oliver Jäckel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING MICROSCOPE FOR MEASURING MASKS FOR LITHOGRAPHIC METHODS A...
- Publication number 20170269347
- Publication date Sep 21, 2017
- Carl Zeiss SMT GMBH
- Oliver Jäckel
- G02 - OPTICS