Oliver Kienzle

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for repairing phase shift masks
- Patent number 8,268,516
- Issue date Sep 18, 2012
- Carl Zeiss SMS GmbH
- Axel Zibold
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for analyzing a group of photolithographic masks
- Patent number 8,264,535
- Issue date Sep 11, 2012
- Carl Zeiss SMS GmbH
- Oliver Kienzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for repairing photolithography masks
- Patent number 7,916,930
- Issue date Mar 29, 2011
- Carl Zeiss SMS GmbH
- Axel Zibold
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REPAIRING PHASE SHIFT MASKS
- Publication number 20100266937
- Publication date Oct 21, 2010
- CARL ZEISS SMS GMBH
- Axel Zibold
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING A GROUP OF PHOTOLITHOGRAPHIC MASKS
- Publication number 20100157046
- Publication date Jun 24, 2010
- Oliver Kienzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for the repair of photolithography masks
- Publication number 20080069431
- Publication date Mar 20, 2008
- Axel Zibold
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY