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Oliver Rosier
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Juchen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method and device for generating EUV radiation and/or soft X-ray ra...
Patent number
7,809,112
Issue date
Oct 5, 2010
Koninklijke Philips Electronics N.V.
Günther Hans Derra
B82 - NANO-TECHNOLOGY
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Patent Grant
Method and device for the generation of far ultraviolet or soft x-r...
Patent number
6,967,341
Issue date
Nov 22, 2005
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung E.V.
Willi Neff
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Device for producing an extreme ultraviolet and soft x radiation fr...
Patent number
6,788,763
Issue date
Sep 7, 2004
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Willi Neff
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Method and Device for Generating in Particular Euv Radiation And/or...
Publication number
20080298552
Publication date
Dec 4, 2008
Koninklijke Philips Electronic, N.V.
Gunther Hans Derra
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and device for the generation of far ultraviolet or soft x-r...
Publication number
20050040347
Publication date
Feb 24, 2005
Willi Neff
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR