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Oliver Schlosser
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Filderstadt, DE
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last 30 patents
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Patent Grant
EUV light source with a beam positioning device
Patent number
12,171,054
Issue date
Dec 17, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing SE
Martin Lambert
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV light source with a separation device
Patent number
11,968,767
Issue date
Apr 23, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Oliver Schlosser
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
APPARATUS FOR CORRECTING ASTIGMATISM OF A LASER BEAM
Publication number
20250105577
Publication date
Mar 27, 2025
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Martin Lambert
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EUV LIGHT SOURCE WITH A BEAM POSITIONING DEVICE
Publication number
20240357726
Publication date
Oct 24, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Martin Lambert
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
EUV LIGHT SOURCE WITH A SEPARATION DEVICE
Publication number
20240057243
Publication date
Feb 15, 2024
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Oliver Schlosser
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR