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Olivier B. Postel
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Riegersdorf, AT
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Patents Grants
last 30 patents
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Patent Grant
Method of collapse-free drying of high aspect ratio structures
Patent number
9,666,427
Issue date
May 30, 2017
Lam Research Corporation
Stephen M. Sirard
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and apparatus for liquid treatment of wafer shaped articles
Patent number
9,093,482
Issue date
Jul 28, 2015
Lam Research AG
Michael Brugger
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF COLLAPSE-FREE DRYING OF HIGH ASPECT RATIO STRUCTURES
Publication number
20140373384
Publication date
Dec 25, 2014
Stephen M. SIRARD
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD AND APPARATUS FOR LIQUID TREATMENT OF WAFER SHAPED ARTICLES
Publication number
20140102637
Publication date
Apr 17, 2014
LAM RESEARCH AG
Michael BRUGGER
H01 - BASIC ELECTRIC ELEMENTS