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Olivier Desplats
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Grenoble, FR
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last 30 patents
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Patent Grant
Multi-level autolimitating etching method
Patent number
9,123,652
Issue date
Sep 1, 2015
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Olivier Desplats
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MULTI-LEVEL AUTOLIMITATING ETCHING METHOD
Publication number
20140242801
Publication date
Aug 28, 2014
CNRS - CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
Olivier Desplats
H01 - BASIC ELECTRIC ELEMENTS