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Olivier Rigoutat
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Bethel, CT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for controlling bevel edge etching in a plasma chamber
Patent number
8,349,202
Issue date
Jan 8, 2013
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas modulation to control edge exclusion in a bevel edge etching pl...
Patent number
8,083,890
Issue date
Dec 27, 2011
Lam Research Corporation
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
COPPER DISCOLORATION PREVENTION FOLLOWING BEVEL ETCH PROCESS
Publication number
20140051255
Publication date
Feb 20, 2014
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Controlling Bevel Edge Etching in a Plasma Chamber
Publication number
20120074099
Publication date
Mar 29, 2012
LAM RESEARCH CORPORATION
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS MODULATION TO CONTROL EDGE EXCLUSION IN A BEVEL EDGE ETCHING PL...
Publication number
20110253312
Publication date
Oct 20, 2011
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS MODULATION TO CONTROL EDGE EXCLUSION IN A BEVEL EDGE ETCHING PL...
Publication number
20090188627
Publication date
Jul 30, 2009
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Copper Discoloration Prevention Following Bevel Etch Process
Publication number
20090170334
Publication date
Jul 2, 2009
Tong Fang
H01 - BASIC ELECTRIC ELEMENTS