OLKAN CUVALCI

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support plate with improved lift pin sealing
- Patent number 10,857,655
- Issue date Dec 8, 2020
- Applied Materials, Inc.
- Olkan Cuvalci
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate support with multi-piece sealing surface
- Patent number 9,916,994
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Olkan Cuvalci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for variable substrate temperature control
- Patent number 9,783,889
- Issue date Oct 10, 2017
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with integrated vacuum and edge purge conduits
- Patent number 9,633,889
- Issue date Apr 25, 2017
- Applied Materials, Inc.
- Olkan Cuvalci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with controlled sealing gap
- Patent number 9,543,186
- Issue date Jan 10, 2017
- Applied Materials, Inc.
- Olkan Cuvalci
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate support for substrate backside contamination control
- Patent number 9,490,150
- Issue date Nov 8, 2016
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with wire mesh plasma containment
- Patent number 9,478,447
- Issue date Oct 25, 2016
- Applied Materials, Inc.
- Olkan Cuvalci
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor with a ceiling electrode supply conduit having a suc...
- Patent number 9,202,674
- Issue date Dec 1, 2015
- Applied Materials, Inc.
- Olkan Cuvalci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for thermal based substrate processing with v...
- Patent number 8,920,564
- Issue date Dec 30, 2014
- Applied Materials, Inc.
- Gwo-Chuan Tzu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support with substrate heater and symmetric RF return
- Patent number 8,618,446
- Issue date Dec 31, 2013
- Applied Materials, Inc.
- Yu Chang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Chemical precursor ampoule for vapor deposition processes
- Patent number 8,146,896
- Issue date Apr 3, 2012
- Applied Materials, Inc.
- Olkan Cuvalci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HOT WALL REACTOR WITH COOLED VACUUM CONTAINMENT
- Publication number 20150059981
- Publication date Mar 5, 2015
- Applied Materials, Inc.
- JOEL M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING
- Publication number 20140265097
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HEATED SUBSTRATE SUPPORT WITH FLATNESS CONTROL
- Publication number 20140251214
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE SUPPORT WITH INTEGRATED VACUUM AND EDGE PURGE CONDUITS
- Publication number 20140252710
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH MULTI-PIECE SEALING SURFACE
- Publication number 20140251207
- Publication date Sep 11, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP
- Publication number 20140217665
- Publication date Aug 7, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Apparatus And Methods For Symmetrical Gas Distribution With High Pu...
- Publication number 20140174362
- Publication date Jun 26, 2014
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH WIRE MESH PLASMA CONTAINMENT
- Publication number 20140144901
- Publication date May 29, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR CHEMICAL DELIVERY SYSTEM
- Publication number 20140137961
- Publication date May 22, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT FOR SUBSTRATE BACKSIDE CONTAMINATION CONTROL
- Publication number 20140008349
- Publication date Jan 9, 2014
- Applied Materials, Inc.
- GWO-CHUAN TZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL
- Publication number 20130247826
- Publication date Sep 26, 2013
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN
- Publication number 20130001215
- Publication date Jan 3, 2013
- Applied Materials, Inc.
- YU CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH V...
- Publication number 20120003388
- Publication date Jan 5, 2012
- Applied Materials, Inc.
- GWO-CHUAN TZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND METHODS THEREOF
- Publication number 20100304027
- Publication date Dec 2, 2010
- Applied Materials, Inc.
- Wei Ti Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES
- Publication number 20100112215
- Publication date May 6, 2010
- APPLIED MATERIALS, INC.
- OLKAN CUVALCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUC...
- Publication number 20100096085
- Publication date Apr 22, 2010
- Applied Materials, Inc.
- OLKAN CUVALCI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated ceramic substrate support with protective coating
- Publication number 20050194374
- Publication date Sep 8, 2005
- APPLIED MATERIALS, INC.
- Avgerinos V. Gelatos
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

OLKAN CUVALCI

Person

Patents Grantslast 30 patents

Substrate support plate with improved lift pin sealing

Substrate support with multi-piece sealing surface

Apparatus for variable substrate temperature control

Substrate support with integrated vacuum and edge purge conduits

Substrate support with controlled sealing gap

Substrate support for substrate backside contamination control

Substrate support with wire mesh plasma containment

Plasma reactor with a ceiling electrode supply conduit having a suc...

Methods and apparatus for thermal based substrate processing with v...

Substrate support with substrate heater and symmetric RF return

Chemical precursor ampoule for vapor deposition processes

Patents Applicationslast 30 patents

HOT WALL REACTOR WITH COOLED VACUUM CONTAINMENT

SUBSTRATE SUPPORT PLATE WITH IMPROVED LIFT PIN SEALING

HEATED SUBSTRATE SUPPORT WITH FLATNESS CONTROL

SUBSTRATE SUPPORT WITH INTEGRATED VACUUM AND EDGE PURGE CONDUITS

SUBSTRATE SUPPORT WITH MULTI-PIECE SEALING SURFACE

SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP

Apparatus And Methods For Symmetrical Gas Distribution With High Pu...

SUBSTRATE SUPPORT WITH WIRE MESH PLASMA CONTAINMENT

MODULAR CHEMICAL DELIVERY SYSTEM

SUBSTRATE SUPPORT FOR SUBSTRATE BACKSIDE CONTAMINATION CONTROL

APPARATUS FOR VARIABLE SUBSTRATE TEMPERATURE CONTROL

SUBSTRATE SUPPORT WITH SUBSTRATE HEATER AND SYMMETRIC RF RETURN

METHODS AND APPARATUS FOR THERMAL BASED SUBSTRATE PROCESSING WITH V...

SUBSTRATE PROCESSING SYSTEM AND METHODS THEREOF

CHEMICAL PRECURSOR AMPOULE FOR VAPOR DEPOSITION PROCESSES

PLASMA REACTOR WITH A CEILING ELECTRODE SUPPLY CONDUIT HAVING A SUC...

Heated ceramic substrate support with protective coating