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Olli Jylha
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Espoo, FI
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Patents Grants
last 30 patents
Information
Patent Grant
Strengthened structural module and method of fabrication
Patent number
8,780,314
Issue date
Jul 15, 2014
Beneq Oy
Olli Jylhä
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reduced cross-contamination between chambers in a semiconductor pro...
Patent number
7,022,613
Issue date
Apr 4, 2006
ASM America, Inc.
Christophe Pomarede
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced cross-contamination between chambers in a semiconductor pro...
Patent number
6,797,617
Issue date
Sep 28, 2004
ASM America, Inc.
Christophe Pomarede
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
STRENGTHENED STRUCTURAL MODULE AND METHOD OF FABRICATION
Publication number
20120307193
Publication date
Dec 6, 2012
Beneq Oy
Olli Jylhä
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTILAYER COATING, METHOD FOR FABRICATING A MULTILAYER COATING, AN...
Publication number
20120177903
Publication date
Jul 12, 2012
Beneq Oy
Sami Sneck
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for preventing metal leaching from copper and its alloys
Publication number
20070269595
Publication date
Nov 22, 2007
PLANAR SYSTEM OY
Kari Harkonen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Reduced cross-contamination between chambers in a semiconductor pro...
Publication number
20040166683
Publication date
Aug 26, 2004
Christophe Pomarede
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Reduced cross-contamination between chambers in a semiconductor pro...
Publication number
20030219977
Publication date
Nov 27, 2003
Christophe Pomarede
H01 - BASIC ELECTRIC ELEMENTS