Olli Kilpela

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Helsinki, FI

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Patents Grantslast 30 patents

Information Patent Grant
Selective formation of metal layers in an integrated circuit
- Patent number 7,476,618
- Issue date Jan 13, 2009
- ASM Japan K.K.
- Olli V. Kilpelä
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition reactor
- Patent number 6,820,570
- Issue date Nov 23, 2004
- Nobel Biocare Services AG
- Olli Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Selective formation of metal layers in an integrated circuit
- Publication number 20060121733
- Publication date Jun 8, 2006
- Olli V. Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vapor reactant source system with choked-flow elements
- Publication number 20050221004
- Publication date Oct 6, 2005
- Olli V. Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition reactor
- Publication number 20050092249
- Publication date May 5, 2005
- Olli Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition reactor
- Publication number 20030075273
- Publication date Apr 24, 2003
- Olli Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...