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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology method, target and substrate
Patent number
11,428,521
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G01 - MEASURING TESTING
Information
Patent Grant
Measuring a process parameter for a manufacturing process involving...
Patent number
11,320,745
Issue date
May 3, 2022
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
11,204,239
Issue date
Dec 21, 2021
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Source separation from metrology data
Patent number
11,016,397
Issue date
May 25, 2021
ASML Netherlands B.V.
Scott Anderson Middlebrooks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,718,604
Issue date
Jul 21, 2020
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, target and substrate
Patent number
10,386,176
Issue date
Aug 20, 2019
ASML Netherlands B.V.
Kaustuve Bhattacharyya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measuring a process parameter for a manufacturing process involving...
Patent number
10,073,357
Issue date
Sep 11, 2018
ASML Netherlands B.V.
Maurits Van Der Schaar
G01 - MEASURING TESTING
Information
Patent Grant
Method, apparatus and substrates for lithographic metrology
Patent number
10,042,268
Issue date
Aug 7, 2018
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method and apparatus, lithographic system and device manu...
Patent number
9,719,945
Issue date
Aug 1, 2017
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for design of a metrology target
Patent number
9,355,200
Issue date
May 31, 2016
ASML Netherlands B.V.
Guangqing Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Metrology method and apparatus, lithographic system and device manu...
Patent number
9,134,256
Issue date
Sep 15, 2015
ASML Netherlands B.V.
Hendrik Jan Hidde Smilde
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20230016664
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20220057192
Publication date
Feb 24, 2022
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Measuring a Process Parameter for a Manufacturing Process Involving...
Publication number
20200401054
Publication date
Dec 24, 2020
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20200348125
Publication date
Nov 5, 2020
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
SOURCE SEPARATION FROM METROLOGY DATA
Publication number
20200192229
Publication date
Jun 18, 2020
ASML NETHERLANDS B.V.
Scott Anderson MIDDLEBROOKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Measuring a Process Parameter for a Manufacturing Process Involving...
Publication number
20190018326
Publication date
Jan 17, 2019
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Measuring a Process Parameter for a Manufacturing Process Involving...
Publication number
20160349627
Publication date
Dec 1, 2016
ASML NETHERLANDS B.V.
Maurits VAN DER SCHAAR
G01 - MEASURING TESTING
Information
Patent Application
Method, Apparatus and Substrates for Lithographic Metrology
Publication number
20160291481
Publication date
Oct 6, 2016
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
Publication number
20160252820
Publication date
Sep 1, 2016
ASML NETHERLANDS B.V.
Guangqing Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METROLOGY METHOD, TARGET AND SUBSTRATE
Publication number
20160061589
Publication date
Mar 3, 2016
ASML NETHERLANDS B.V.
Kaustuve BHATTACHARYYA
G01 - MEASURING TESTING
Information
Patent Application
Metrology Method and Apparatus, Lithographic System and Device Manu...
Publication number
20150346116
Publication date
Dec 3, 2015
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
Publication number
20150186581
Publication date
Jul 2, 2015
ASML NETHERLANDS B.V.
Guangqing Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Metrology Method and Apparatus, Lithographic System and Device Manu...
Publication number
20130258310
Publication date
Oct 3, 2013
ASML NETHERLANDS B.V.
Hendrik Jan Hidde SMILDE
G01 - MEASURING TESTING