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Wafer handling system
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Patent number 5,193,972
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Issue date Mar 16, 1993
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SVG Lithography Systems, Inc.
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Orest Engelbrecht
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer handling system
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Patent number 5,085,558
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Issue date Feb 4, 1992
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SVG Lithography Systems, Inc.
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Orest Engelbrecht
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H01 - BASIC ELECTRIC ELEMENTS
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Reticle frame assembly
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Patent number 4,986,007
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Issue date Jan 22, 1991
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SVG Lithography Systems, Inc.
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Joseph L. Laganza
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Wafer handling system
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Patent number 4,973,217
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Issue date Nov 27, 1990
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SVG Lithography Systems, Inc.
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Orest Engelbrecht
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H01 - BASIC ELECTRIC ELEMENTS
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Wafer handling system
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Patent number 4,846,626
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Issue date Jul 11, 1989
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The Perkin-Elmer Corporation
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Orest Engelbrecht
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H01 - BASIC ELECTRIC ELEMENTS
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Reticle transporter
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Patent number 4,719,705
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Issue date Jan 19, 1988
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The Perkin-Elmer Corporation
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Joseph L. Laganza
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Wafer transferring chuck assembly
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Patent number 4,530,635
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Issue date Jul 23, 1985
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The Perkin-Elmer Corporation
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Orest Engelbrecht
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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