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Oakland, CA, US
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last 30 patents
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Patent Grant
Method and apparatus for autonomous tool parameter impact identific...
Patent number
10,571,900
Issue date
Feb 25, 2020
Tokyo Electron Limited
Sanjeev Kaushal
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Tool failure analysis using space-distorted similarity
Patent number
10,228,678
Issue date
Mar 12, 2019
Tokyo Electron Limited
Sanjeev Kaushal
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for autonomous tool parameter impact identific...
Patent number
9,746,849
Issue date
Aug 29, 2017
Tokyo Electron Limited
Sanjeev Kaushal
G05 - CONTROLLING REGULATING
Information
Patent Grant
Biologically based chamber matching
Patent number
8,723,869
Issue date
May 13, 2014
Tokyo Electron Limited
Sanjeev Kaushal
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFIC...
Publication number
20170329318
Publication date
Nov 16, 2017
TOKYO ELECTRON LIMITED
Sanjeev Kaushal
G05 - CONTROLLING REGULATING
Information
Patent Application
TOOL FAILURE ANALYSIS USING SPACE-DISTORTED SIMILARITY
Publication number
20170023927
Publication date
Jan 26, 2017
TOKYO ELECTRON LIMITED
Sanjeev Kaushal
G05 - CONTROLLING REGULATING
Information
Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
Publication number
20140304196
Publication date
Oct 9, 2014
Sanjeev Kaushal
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR AUTONOMOUS TOOL PARAMETER IMPACT IDENTIFIC...
Publication number
20140135970
Publication date
May 15, 2014
TOKYO ELECTRON LIMITED
Sanjeev Kaushal
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BIOLOGICALLY BASED CHAMBER MATCHING
Publication number
20120242667
Publication date
Sep 27, 2012
TOKYO ELECTRON LIMITED
Sanjeev Kaushal
G06 - COMPUTING CALCULATING COUNTING