Orlando Escorcia

Person

Falls Church, VA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma mediated ashing processes that include formation of a protec...
- Patent number 9,128,382
- Issue date Sep 8, 2015
- Lam Research Corporation
- Ivan Berry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and process for treating dielectric materials
- Patent number 7,709,814
- Issue date May 4, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet assisted pore sealing of porous low k dielectric films
- Patent number 7,704,872
- Issue date Apr 27, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultraviolet assisted pore sealing of porous low k dielectric films
- Patent number 7,678,682
- Issue date Mar 16, 2010
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultraviolet assisted porogen removal and/or curing processes for fo...
- Patent number 7,629,272
- Issue date Dec 8, 2009
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ashing process for removing photoresist and residues during...
- Patent number 7,078,161
- Issue date Jul 18, 2006
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluorine-free plasma curing process for porous low-k materials
- Patent number 7,011,868
- Issue date Mar 14, 2006
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma ashing process
- Patent number 6,951,823
- Issue date Oct 4, 2005
- Axcelis Technologies, Inc.
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma curing process for porous low-k materials
- Patent number 6,913,796
- Issue date Jul 5, 2005
- Axcelis Technologies, Inc.
- Ralph Albano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process for removing polymer and residues from substrates
- Patent number 6,834,656
- Issue date Dec 28, 2004
- Axcelis Technology, Inc.
- Han Qingyuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma curing of MSQ-based porous low-k film materials
- Patent number 6,759,098
- Issue date Jul 6, 2004
- Axcelis Technologies, Inc.
- Qingyuan Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultraviolet curing processes for advanced low-k materials
- Patent number 6,756,085
- Issue date Jun 29, 2004
- Axcelis Technologies, Inc.
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma ashing process
- Patent number 6,630,406
- Issue date Oct 7, 2003
- Axcelis Technologies
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS
- Publication number 20150136171
- Publication date May 21, 2015
- LAM RESEARCH CORPORATION
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS
- Publication number 20140263179
- Publication date Sep 18, 2014
- LAM RESEARCH CORPORATION
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTEC...
- Publication number 20140103010
- Publication date Apr 17, 2014
- LAM RESEARCH CORPORATION
- Ivan Berry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEDIATED ASHING PROCESSES
- Publication number 20140076353
- Publication date Mar 20, 2014
- LAM RESEARCH CORPORATION
- Ivan L. Berry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEDIATED ASHING PROCESSES
- Publication number 20120024314
- Publication date Feb 2, 2012
- Axcelis Technologies, Inc.
- SHIJIAN LUO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA MEDIATED ASHING PROCESSES
- Publication number 20110226280
- Publication date Sep 22, 2011
- Axcelis Technologies, Inc.
- Ivan L. Berry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS
- Publication number 20100130017
- Publication date May 27, 2010
- Axcelis Technologies, Inc.
- Shijian Luo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTEC...
- Publication number 20090277871
- Publication date Nov 12, 2009
- Axcelis Technologies, Inc.
- Ivan Berry
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ultraviolet assisted pore sealing of porous low K dielectric films
- Publication number 20070134935
- Publication date Jun 14, 2007
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ultraviolet curing process for low k dielectric films
- Publication number 20060274405
- Publication date Dec 7, 2006
- Carlo Waldfried
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Apparatus and process for treating dielectric materials
- Publication number 20060141806
- Publication date Jun 29, 2006
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultraviolet assisted pore sealing of porous low k dielectric films
- Publication number 20060105566
- Publication date May 18, 2006
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ultraviolet assisted porogen removal and/or curing processes for fo...
- Publication number 20060024976
- Publication date Feb 2, 2006
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ultraviolet curing process for spin-on dielectric materials used in...
- Publication number 20050272220
- Publication date Dec 8, 2005
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma ashing process for removing photoresist and residues during...
- Publication number 20040157170
- Publication date Aug 12, 2004
- Carlo Waldfried
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Drying process for low-k dielectric films
- Publication number 20040099283
- Publication date May 27, 2004
- Axcelis Technologies, Inc.
- Carlo Waldfried
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma ashing process
- Publication number 20040084412
- Publication date May 6, 2004
- Carlo Waldfried
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Low temperature UV pretreating of porous low-k materials
- Publication number 20040058090
- Publication date Mar 25, 2004
- Carlo Waldfried
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Fluorine-free plasma curing process for porous low-k materials
- Publication number 20040028916
- Publication date Feb 12, 2004
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ultraviolet curing processes for advanced low-k materials
- Publication number 20040018319
- Publication date Jan 29, 2004
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fluorine-free plasma curing process for porous low-k materials
- Publication number 20030157267
- Publication date Aug 21, 2003
- Carlo Waldfried
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ultraviolet curing process for porous low-K materials
- Publication number 20030054115
- Publication date Mar 20, 2003
- Ralph Albano
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Plasma ashing process
- Publication number 20030032300
- Publication date Feb 13, 2003
- Carlo Waldfried
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma process for removing polymer and residues from substrates
- Publication number 20020185151
- Publication date Dec 12, 2002
- Han Qingyuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma curing process for porous low-k materials
- Publication number 20020106500
- Publication date Aug 8, 2002
- Ralph Albano
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Plasma curing of MSQ-based porous low-k film materials
- Publication number 20020102413
- Publication date Aug 1, 2002
- Qingyuan Han
- C01 - INORGANIC CHEMISTRY

Orlando Escorcia

Person

Patents Grantslast 30 patents

Plasma mediated ashing processes that include formation of a protec...

Apparatus and process for treating dielectric materials

Ultraviolet assisted pore sealing of porous low k dielectric films

Ultraviolet assisted pore sealing of porous low k dielectric films

Ultraviolet assisted porogen removal and/or curing processes for fo...

Plasma ashing process for removing photoresist and residues during...

Fluorine-free plasma curing process for porous low-k materials

Plasma ashing process

Plasma curing process for porous low-k materials

Plasma process for removing polymer and residues from substrates

Plasma curing of MSQ-based porous low-k film materials

Ultraviolet curing processes for advanced low-k materials

Plasma ashing process

Patents Applicationslast 30 patents

LIQUID OR VAPOR INJECTION PLASMA ASHING SYSTEMS AND METHODS

TUNING SYSTEM AND METHOD FOR PLASMA-BASED SUBSTRATE PROCESSING SYSTEMS

PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTEC...

PLASMA MEDIATED ASHING PROCESSES

PLASMA MEDIATED ASHING PROCESSES

PLASMA MEDIATED ASHING PROCESSES

FRONT END OF LINE PLASMA MEDIATED ASHING PROCESSES AND APPARATUS

PLASMA MEDIATED ASHING PROCESSES THAT INCLUDE FORMATION OF A PROTEC...

Ultraviolet assisted pore sealing of porous low K dielectric films

Ultraviolet curing process for low k dielectric films

Apparatus and process for treating dielectric materials

Ultraviolet assisted pore sealing of porous low k dielectric films

Ultraviolet assisted porogen removal and/or curing processes for fo...

Ultraviolet curing process for spin-on dielectric materials used in...

Plasma ashing process for removing photoresist and residues during...

Drying process for low-k dielectric films

Plasma ashing process

Low temperature UV pretreating of porous low-k materials

Fluorine-free plasma curing process for porous low-k materials

Ultraviolet curing processes for advanced low-k materials

Fluorine-free plasma curing process for porous low-k materials

Ultraviolet curing process for porous low-K materials

Plasma ashing process

Plasma process for removing polymer and residues from substrates

Plasma curing process for porous low-k materials

Plasma curing of MSQ-based porous low-k film materials