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Surface treatment apparatus
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Patent number 4,901,667
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Issue date Feb 20, 1990
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Hitachi, Ltd.
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Keizo Suzuki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma confinement system
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Patent number 4,863,671
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Issue date Sep 5, 1989
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Hitachi, Ltd.
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Osami Okada
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Ion source
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Patent number 4,658,143
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Issue date Apr 14, 1987
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Hitachi, Ltd.
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Katsumi Tokiguchi
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implanter
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Patent number 4,633,138
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Issue date Dec 30, 1986
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Hitachi, Ltd.
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Katsumi Tokiguchi
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G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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Plasma ion source
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Patent number 4,629,930
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Issue date Dec 16, 1986
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Hitachi, Ltd.
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Noriyuki Sakudo
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H01 - BASIC ELECTRIC ELEMENTS
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Microwave plasma source
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Patent number 4,433,228
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Issue date Feb 21, 1984
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Hitachi, Ltd.
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Shigeru Nishimatsu
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H01 - BASIC ELECTRIC ELEMENTS