Osamu Hirakawa

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Foreign substance removal apparatus and foreign substance detection...
- Patent number 10,946,419
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Osamu Hirakawa
- B08 - CLEANING
Information Patent Grant
Foreign substance removal apparatus and foreign substance detection...
- Patent number 10,160,015
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Osamu Hirakawa
- B08 - CLEANING
Information Patent Grant
Separation apparatus, separation system, and separation method
- Patent number 10,071,544
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separation method, separation apparatus, and separation system
- Patent number 9,956,755
- Issue date May 1, 2018
- Tokyo Electron Limited
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Peeling device, peeling system and peeling method
- Patent number 9,919,509
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Separation apparatus, separation system, and separation method
- Patent number 9,827,756
- Issue date Nov 28, 2017
- Tokyo Electron Limited
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate conveyance apparatus and substrate peeling system
- Patent number 9,679,798
- Issue date Jun 13, 2017
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device, peeling system, cleaning method and computer-reada...
- Patent number 9,613,797
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus and substrate holding method
- Patent number 9,343,349
- Issue date May 17, 2016
- Tokyo Electron Limited
- Yasuharu Iwashita
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Separation system, separation method, program and computer storage...
- Patent number 9,330,898
- Issue date May 3, 2016
- Tokyo Electron Limited
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Grant
Substrate inverting device, substrate inverting method, and peeling...
- Patent number 8,997,822
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Delamination system
- Patent number 8,997,821
- Issue date Apr 7, 2015
- Tokyo Electron Limited
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Grant
Joint apparatus, joint method, and computer storage medium
- Patent number 8,490,856
- Issue date Jul 23, 2013
- Tokyo Electron Limited
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,330,934
- Issue date Dec 11, 2012
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,924,402
- Issue date Apr 12, 2011
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Heating apparatus, heating method, coating apparatus, and storage m...
- Patent number 7,838,801
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Osamu Hirakawa
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,697,110
- Issue date Apr 13, 2010
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coater/developer and coating/developing method
- Patent number 7,530,749
- Issue date May 12, 2009
- Tokyo Electron Limited
- Taro Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and method for applying a liquid to a semiconduct...
- Patent number 5,089,305
- Issue date Feb 18, 1992
- Tokyo Electron Limited
- Mitsuru Ushijima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist process apparatus
- Patent number 5,061,144
- Issue date Oct 29, 1991
- Tokyo Electron Limited
- Masami Akimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,028,955
- Issue date Jul 2, 1991
- Tokyo Electron Limited
- Yasushi Hayashida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating apparatus and method for applying a liquid to a semiconduct...
- Patent number 5,002,008
- Issue date Mar 26, 1991
- Tokyo Electron Limited
- Mitsuru Ushijima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating device
- Patent number 4,899,686
- Issue date Feb 13, 1990
- Tokyo Electron Limited
- Takayuki Toshima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FOREIGN SUBSTANCE REMOVAL APPARATUS AND FOREIGN SUBSTANCE DETECTION...
- Publication number 20190105691
- Publication date Apr 11, 2019
- TOKYO ELECTRON LIMITED
- Osamu HIRAKAWA
- B08 - CLEANING
Information Patent Application
FOREIGN SUBSTANCE REMOVAL APPARATUS AND FOREIGN SUBSTANCE DETECTION...
- Publication number 20160296982
- Publication date Oct 13, 2016
- TOKYO ELECTRON LIMITED
- Osamu HIRAKAWA
- B08 - CLEANING
Information Patent Application
Cleaning Device, Peeling System, Cleaning Method and Computer-Reada...
- Publication number 20150314339
- Publication date Nov 5, 2015
- TOKYO ELECTRON LIMITED
- Osamu HIRAKAWA
- B08 - CLEANING
Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...
- Publication number 20140284000
- Publication date Sep 25, 2014
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE CONVEYANCE APPARATUS AND SUBSTRATE PEELING SYSTEM
- Publication number 20140234033
- Publication date Aug 21, 2014
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BONDING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND BONDING METHOD
- Publication number 20140158303
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DELAMINATION SYSTEM
- Publication number 20140069588
- Publication date Mar 13, 2014
- TOKYO ELECTRON LIMITED
- Osamu HIRAKAWA
- B32 - LAYERED PRODUCTS
Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD
- Publication number 20140020846
- Publication date Jan 23, 2014
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Application
SEPARATION METHOD, SEPARATION APPARATUS, AND SEPARATION SYSTEM
- Publication number 20130327484
- Publication date Dec 12, 2013
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE INVERTING DEVICE, SUBSTRATE INVERTING METHOD, AND PEELING...
- Publication number 20130292062
- Publication date Nov 7, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu Iwashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD
- Publication number 20130269879
- Publication date Oct 17, 2013
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD
- Publication number 20130264780
- Publication date Oct 10, 2013
- TOKYO ELECTRON LIMITED
- Yasuharu IWASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
JOINT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND JOINT METHOD
- Publication number 20130153116
- Publication date Jun 20, 2013
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD
- Publication number 20130146228
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Osamu HIRAKAWA
- B32 - LAYERED PRODUCTS
Information Patent Application
SEPARATION SYSTEM, SEPARATION METHOD, PROGRAM AND COMPUTER STORAGE...
- Publication number 20130146229
- Publication date Jun 13, 2013
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Application
CLEANING METHOD AND CLEANING APPARATUS
- Publication number 20130000684
- Publication date Jan 3, 2013
- TOKYO ELECTRON LIMITED
- Yasutaka SOMA
- B32 - LAYERED PRODUCTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, PROGRA...
- Publication number 20120329000
- Publication date Dec 27, 2012
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JOINT APPARATUS, JOINT METHOD, AND COMPUTER STORAGE MEDIUM
- Publication number 20120318856
- Publication date Dec 20, 2012
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- B32 - LAYERED PRODUCTS
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20100157262
- Publication date Jun 24, 2010
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and Device Manufacturing Method
- Publication number 20070242241
- Publication date Oct 18, 2007
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Heating apparatus, heating method, coating apparatus, and storage m...
- Publication number 20070194005
- Publication date Aug 23, 2007
- TOKYO ELECTRON LIMITED
- Osamu Hirakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coater/developer and coating/developing method
- Publication number 20070122551
- Publication date May 31, 2007
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060231206
- Publication date Oct 19, 2006
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Osamu Hirakawa

Person

Patents Grantslast 30 patents

Foreign substance removal apparatus and foreign substance detection...

Foreign substance removal apparatus and foreign substance detection...

Separation apparatus, separation system, and separation method

Separation method, separation apparatus, and separation system

Peeling device, peeling system and peeling method

Separation apparatus, separation system, and separation method

Substrate conveyance apparatus and substrate peeling system

Cleaning device, peeling system, cleaning method and computer-reada...

Substrate holding apparatus and substrate holding method

Separation system, separation method, program and computer storage...

Substrate inverting device, substrate inverting method, and peeling...

Delamination system

Joint apparatus, joint method, and computer storage medium

Exposure apparatus and device manufacturing method

Exposure apparatus and device manufacturing method

Heating apparatus, heating method, coating apparatus, and storage m...

Exposure apparatus and device manufacturing method

Coater/developer and coating/developing method

Coating apparatus and method for applying a liquid to a semiconduct...

Resist process apparatus

Exposure apparatus

Coating apparatus and method for applying a liquid to a semiconduct...

Coating device

Patents Applicationslast 30 patents

FOREIGN SUBSTANCE REMOVAL APPARATUS AND FOREIGN SUBSTANCE DETECTION...

FOREIGN SUBSTANCE REMOVAL APPARATUS AND FOREIGN SUBSTANCE DETECTION...

Cleaning Device, Peeling System, Cleaning Method and Computer-Reada...

SEPARATION APPARATUS, SEPARATION SYSTEM, SEPARATION METHOD AND NON-...

SUBSTRATE CONVEYANCE APPARATUS AND SUBSTRATE PEELING SYSTEM

BONDING SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND BONDING METHOD

DELAMINATION SYSTEM

SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD

SEPARATION METHOD, SEPARATION APPARATUS, AND SEPARATION SYSTEM

SUBSTRATE INVERTING DEVICE, SUBSTRATE INVERTING METHOD, AND PEELING...

PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE HOLDING METHOD

JOINT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND JOINT METHOD

SEPARATION APPARATUS, SEPARATION SYSTEM, AND SEPARATION METHOD

SEPARATION SYSTEM, SEPARATION METHOD, PROGRAM AND COMPUTER STORAGE...

CLEANING METHOD AND CLEANING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, PROGRA...

JOINT APPARATUS, JOINT METHOD, AND COMPUTER STORAGE MEDIUM

Exposure apparatus and device manufacturing method

Exposure Apparatus and Device Manufacturing Method

Heating apparatus, heating method, coating apparatus, and storage m...

Coater/developer and coating/developing method

Exposure apparatus and device manufacturing method