Osamu Horiguchi

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Scheduling method and program for a substrate processing apparatus
- Patent number 6,889,105
- Issue date May 3, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Nobuhiro Mukuta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Scheduling method and program for a substrate processing apparatus
- Publication number 20020173868
- Publication date Nov 21, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Nobuhiro Mukuta
- G05 - CONTROLLING REGULATING