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Osamu IIZUKA
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
11,127,566
Issue date
Sep 21, 2021
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
11,037,759
Issue date
Jun 15, 2021
NuFlare Technology, Inc.
Ryoichi Kakehi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-charged-particle-beam writing apparatus and beam evaluating m...
Patent number
11,024,485
Issue date
Jun 1, 2021
NuFlare Technology, Inc.
Eita Fujisaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
10,867,774
Issue date
Dec 15, 2020
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aperture array alignment method and multi charged particle beam wri...
Patent number
10,636,616
Issue date
Apr 28, 2020
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
10,504,696
Issue date
Dec 10, 2019
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
10,497,539
Issue date
Dec 3, 2019
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
10,483,088
Issue date
Nov 19, 2019
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam drawing apparatus and multi charged par...
Patent number
10,388,488
Issue date
Aug 20, 2019
NuFlare Technology, Inc.
Hirofumi Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged-particle beam writing apparatus and adjustment method...
Patent number
10,109,458
Issue date
Oct 23, 2018
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam apparatus, and shape adjustment method...
Patent number
9,966,228
Issue date
May 8, 2018
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of measuring beam position of multi charged particle beam, a...
Patent number
9,653,262
Issue date
May 16, 2017
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for correcting drift of charged particle beam, and charged p...
Patent number
9,536,705
Issue date
Jan 3, 2017
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotation angle measuring method of multi-charged particle beam imag...
Patent number
9,466,461
Issue date
Oct 11, 2016
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing method, computer-readable recording m...
Patent number
9,460,892
Issue date
Oct 4, 2016
NuFlare Technology, Inc.
Sumito Nakada
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged-particle beam drawing method, computer-readable recording m...
Patent number
9,236,154
Issue date
Jan 12, 2016
NuFlare Technology, Inc.
Sumito Nakada
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam drift correction method and electron beam writing method
Patent number
8,362,450
Issue date
Jan 29, 2013
Nuflare Technology, Inc.
Osamu Iizuka
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithography apparatus and focusing method for charged particle beam
Patent number
8,253,112
Issue date
Aug 28, 2012
Nuflare Technology, Inc.
Osamu Iizuka
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Focusing method of charged particle beam and astigmatism adjusting...
Patent number
8,188,443
Issue date
May 29, 2012
Nuflare Technology, Inc.
Kenji Ohtoshi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of acquiring offset deflection amount for shaped beam and li...
Patent number
8,008,631
Issue date
Aug 30, 2011
Nuflare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
BEAM POSITION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM WRITING...
Publication number
20250054727
Publication date
Feb 13, 2025
NuFlare Technology, Inc.
Tsubasa NANAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20220359156
Publication date
Nov 10, 2022
NuFlare Technology, Inc.
Tsubasa NANAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20200328060
Publication date
Oct 15, 2020
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED-PARTICLE-BEAM WRITING APPARATUS AND BEAM EVALUATING M...
Publication number
20190385812
Publication date
Dec 19, 2019
NuFlare Technology, Inc.
Eita FUJISAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APERTURE ARRAY ALIGNMENT METHOD AND MULTI CHARGED PARTICLE BEAM WRI...
Publication number
20190214218
Publication date
Jul 11, 2019
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20190103252
Publication date
Apr 4, 2019
NuFlare Technology, Inc.
Ryoichi KAKEHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20190035603
Publication date
Jan 31, 2019
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM DRAWING APPARATUS AND MULTI CHARGED PAR...
Publication number
20180350552
Publication date
Dec 6, 2018
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20180144905
Publication date
May 24, 2018
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20180138012
Publication date
May 17, 2018
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20180138013
Publication date
May 17, 2018
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED-PARTICLE BEAM WRITING APPARATUS AND ADJUSTMENT METHOD...
Publication number
20170358425
Publication date
Dec 14, 2017
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM APPARATUS, AND SHAPE ADJUSTMENT METHOD...
Publication number
20170169993
Publication date
Jun 15, 2017
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROTATION ANGLE MEASURING METHOD OF MULTI-CHARGED PARTICLE BEAM IMAG...
Publication number
20160211111
Publication date
Jul 21, 2016
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MEASURING BEAM POSITION OF MULTI CHARGED PARTICLE BEAM, A...
Publication number
20160086764
Publication date
Mar 24, 2016
NuFlare Technology, Inc.
Osamu IIZUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CORRECTING DRIFT OF CHARGED PARTICLE BEAM, AND CHARGED P...
Publication number
20150270101
Publication date
Sep 24, 2015
NuFlare Technology, Inc.
Osamu IIZUKA
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD, COMPUTER-READABLE RECORDING M...
Publication number
20140166869
Publication date
Jun 19, 2014
NuFlare Technology, Inc.
Sumito NAKADA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED-PARTICLE BEAM DRAWING METHOD, COMPUTER-READABLE RECORDING M...
Publication number
20130177855
Publication date
Jul 11, 2013
NuFlare Technology, Inc.
Sumito NAKADA
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD OF ACQUIRING OFFSET DEFLECTION AMOUNT FOR SHAPED BEAM AND LI...
Publication number
20100001203
Publication date
Jan 7, 2010
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Application
LITHOGRAPHY APPARATUS AND FOCUSING METHOD FOR CHARGED PARTICLE BEAM
Publication number
20090314950
Publication date
Dec 24, 2009
NuFlare Technology, Inc.
Osamu IIZUKA
B82 - NANO-TECHNOLOGY
Information
Patent Application
FOCUSING METHOD OF CHARGED PARTICLE BEAM AND ASTIGMATISM ADJUSTING...
Publication number
20080217553
Publication date
Sep 11, 2008
NuFlare Technology, Inc.
Kenji Ohtoshi
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electron beam drift correction method and electron beam writing method
Publication number
20070023689
Publication date
Feb 1, 2007
NuFlare Technology, Inc.
Osamu Iizuka
B82 - NANO-TECHNOLOGY