Osamu Ikenaga

Person

Kawasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Mask pattern verifying method
- Patent number 8,121,387
- Issue date Feb 21, 2012
- Kabushiki Kaisha Toshiba
- Mitsuyo Asano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor mask inspection using die-to-die and die-to-database...
- Patent number 8,036,446
- Issue date Oct 11, 2011
- Kabushiki Kaisha Toshiba
- Osamu Ikenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of evaluating a photo mask and method of manufacturing a sem...
- Patent number 7,912,275
- Issue date Mar 22, 2011
- Kabushiki Kaisha Toshiba
- Hiroki Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask defect inspection data generating method, mask defect inspecti...
- Patent number 7,742,162
- Issue date Jun 22, 2010
- Kabushiki Kaisha Toshiba
- Tomohiro Tsutsui
- G01 - MEASURING TESTING
Information Patent Grant
Method of creating photo mask data, method of photo mask manufactur...
- Patent number 7,735,055
- Issue date Jun 8, 2010
- Kabushiki Kaisha Toshiba
- Tomohiro Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for evaluating photo mask and method for manufacturing semic...
- Patent number 7,229,721
- Issue date Jun 12, 2007
- Kabushiki Kaisha Toshiba
- Shoji Mimotogi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photo mask, method of manufacturing photo mask, and method of gener...
- Patent number 7,222,327
- Issue date May 22, 2007
- Kabushiki Kaisha Toshiba
- Tomohiro Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a photo mask and method of manufacturing a...
- Patent number 7,090,949
- Issue date Aug 15, 2006
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing a photomask and method of manufacturing a s...
- Patent number 7,008,731
- Issue date Mar 7, 2006
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing photomask
- Patent number 6,649,310
- Issue date Nov 18, 2003
- Kabushiki Kaisha Toshiba
- Masamitsu Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming photomask and method of manufacturing semiconduct...
- Patent number 6,333,213
- Issue date Dec 25, 2001
- Kabushiki Kaisha Toshiba
- Shigeru Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of drawing a pattern on wafer with charged beam
- Patent number 4,989,156
- Issue date Jan 29, 1991
- Kabushiki Kaisha Toshiba
- Osamu Ikenaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for drawing a desired circuit pattern using charged particle...
- Patent number 4,878,177
- Issue date Oct 31, 1989
- Kabushiki Kaisha Toshiba
- Osamu Ikenaga
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus for inspecting mask used for manufacturing integrated cir...
- Patent number 4,623,256
- Issue date Nov 18, 1986
- Kabushiki Kaisha Toshiba
- Osamu Ikenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PATTERN FORMING METHOD AND PATTERN FORMING DEVICE
- Publication number 20120049396
- Publication date Mar 1, 2012
- Tomohiro Tsutsui
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF EVALUATING A PHOTO MASK AND METHOD OF MANUFACTURING A SEM...
- Publication number 20090202924
- Publication date Aug 13, 2009
- Hiroki YAMAMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK HAVING CODE PATTERN FORMED BY CODING DATA CONVERSION PROC...
- Publication number 20090162758
- Publication date Jun 25, 2009
- Osamu Ikenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK DEFECT INSPECTION DATA GENERATING METHOD, MASK DEFECT INSPECTI...
- Publication number 20090046280
- Publication date Feb 19, 2009
- Tomohiro TSUTSUI
- G01 - MEASURING TESTING
Information Patent Application
MASK PATTERN VERIFYING METHOD
- Publication number 20080232671
- Publication date Sep 25, 2008
- Mitsuyo ASANO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Photomask formation method, photomask, and semiconductor device fab...
- Publication number 20070207393
- Publication date Sep 6, 2007
- Osamu Ikenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of creating photo mask data, method of photo mask manufactur...
- Publication number 20060292458
- Publication date Dec 28, 2006
- Tomohiro Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask forming method and semiconductor device manufacturing method
- Publication number 20060270072
- Publication date Nov 30, 2006
- Osamu Ikenaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of producing mask inspection data, method of manufacturing a...
- Publication number 20060206853
- Publication date Sep 14, 2006
- Takashi Kamo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern extracting system, method for extracting measuring points,...
- Publication number 20060190875
- Publication date Aug 24, 2006
- Yukiyasu Arisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photo mask, method of manufacturing photo mask, and method of gener...
- Publication number 20050003280
- Publication date Jan 6, 2005
- Tomohiro Tsutsui
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing a photo mask and method of manufacturing a...
- Publication number 20040146788
- Publication date Jul 29, 2004
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for evaluating photo mask and method for manufacturing semic...
- Publication number 20040137340
- Publication date Jul 15, 2004
- Shoji Mimotogi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing a photomask and method of manufacturing a s...
- Publication number 20030162105
- Publication date Aug 28, 2003
- Kabushiki Kaisha Toshiba
- Shigeki Nojima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask trading system and method
- Publication number 20030074274
- Publication date Apr 17, 2003
- Suigen Kyoh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of manufacturing photomask
- Publication number 20020025480
- Publication date Feb 28, 2002
- Masamitsu Itoh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of forming photomask and method of manufacturing semiconduct...
- Publication number 20010005619
- Publication date Jun 28, 2001
- Kabushiki Kaisha Toshiba
- Shigeru Hasebe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Osamu Ikenaga

Person

Patents Grantslast 30 patents

Mask pattern verifying method

Semiconductor mask inspection using die-to-die and die-to-database...

Method of evaluating a photo mask and method of manufacturing a sem...

Mask defect inspection data generating method, mask defect inspecti...

Method of creating photo mask data, method of photo mask manufactur...

Method for evaluating photo mask and method for manufacturing semic...

Photo mask, method of manufacturing photo mask, and method of gener...

Method of manufacturing a photo mask and method of manufacturing a...

Method of manufacturing a photomask and method of manufacturing a s...

Method of manufacturing photomask

Method of forming photomask and method of manufacturing semiconduct...

Method of drawing a pattern on wafer with charged beam

Method for drawing a desired circuit pattern using charged particle...

Apparatus for inspecting mask used for manufacturing integrated cir...

Patents Applicationslast 30 patents

PATTERN FORMING METHOD AND PATTERN FORMING DEVICE

METHOD OF EVALUATING A PHOTO MASK AND METHOD OF MANUFACTURING A SEM...

PHOTOMASK HAVING CODE PATTERN FORMED BY CODING DATA CONVERSION PROC...

MASK DEFECT INSPECTION DATA GENERATING METHOD, MASK DEFECT INSPECTI...

MASK PATTERN VERIFYING METHOD

Photomask formation method, photomask, and semiconductor device fab...

Method of creating photo mask data, method of photo mask manufactur...

Mask forming method and semiconductor device manufacturing method

Method of producing mask inspection data, method of manufacturing a...

Pattern extracting system, method for extracting measuring points,...

Photo mask, method of manufacturing photo mask, and method of gener...

Method of manufacturing a photo mask and method of manufacturing a...

Method for evaluating photo mask and method for manufacturing semic...

Method of manufacturing a photomask and method of manufacturing a s...

Mask trading system and method

Method of manufacturing photomask

Method of forming photomask and method of manufacturing semiconduct...