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Osamu Irino
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Shizuoka, JP
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last 30 patents
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Patent Grant
Thin film production apparatus and inner block for thin film produc...
Patent number
8,747,555
Issue date
Jun 10, 2014
ULVAC, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film-forming apparatus
Patent number
8,419,854
Issue date
Apr 16, 2013
Ulvac, Inc.
Masanobu Hatanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Purge gas assembly
Patent number
8,377,207
Issue date
Feb 19, 2013
ULVAC, Inc.
Tsuyoshi Kagami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
FILM-FORMING APPARATUS
Publication number
20100180819
Publication date
Jul 22, 2010
Ulvac, Inc.
Masanobu Hatanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PURGE GAS ASSEMBLY
Publication number
20100139556
Publication date
Jun 10, 2010
Tsuyoshi Kagami
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THIN FILM PRODUCTION APPARATUS AND INNER BLOCK FOR THIN FILM PRODUC...
Publication number
20090159006
Publication date
Jun 25, 2009
Ulvac, Inc.
Takakazu Yamada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...