Osamu Kakuchi

Person

Kasama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement method, measurement apparatus, exposure apparatus, and...
- Patent number 7,995,213
- Issue date Aug 9, 2011
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatuses and methods using measurement of a flare generated in a...
- Patent number 7,907,263
- Issue date Mar 15, 2011
- Canon Kabushiki Kaisha
- Michiko Aizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring wavefront retardance aberration based on wavefr...
- Patent number 7,773,233
- Issue date Aug 10, 2010
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring apparatus, exposure apparatus and device manufacturing me...
- Patent number 7,276,717
- Issue date Oct 2, 2007
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with interferometer
- Patent number 7,236,254
- Issue date Jun 26, 2007
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Grant
Aberration measuring method for projection optical system with a va...
- Patent number 7,095,509
- Issue date Aug 22, 2006
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus with interferometer
- Patent number 7,023,561
- Issue date Apr 4, 2006
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Grant
Projection exposure apparatus
- Patent number 6,924,881
- Issue date Aug 2, 2005
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Projection exposure apparatus
- Patent number 6,633,362
- Issue date Oct 14, 2003
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus with interferometer
- Patent number 6,614,535
- Issue date Sep 2, 2003
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Grant
Depth/height measuring device
- Patent number 5,087,121
- Issue date Feb 11, 1992
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Grant
Fabri-perot spectroscopy method and apparatus utilizing the same
- Patent number 4,850,709
- Issue date Jul 25, 1989
- Canon Kabushiki Kaisha
- Mikichi Ban
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
- Publication number 20100265515
- Publication date Oct 21, 2010
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUSES AND METHODS USING MEASUREMENT OF A FLARE GENERATED IN A...
- Publication number 20100002243
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Michiko Aizawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EVALUATION METHOD, EVALUATION APPARATUS, AND EXPOSURE APPARATUS
- Publication number 20090219494
- Publication date Sep 3, 2009
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...
- Publication number 20080273200
- Publication date Nov 6, 2008
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus with interferometer
- Publication number 20060114476
- Publication date Jun 1, 2006
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Application
Measuring apparatus, exposure apparatus and device manufacturing me...
- Publication number 20060097205
- Publication date May 11, 2006
- Osamu Kakuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus with interferometer
- Publication number 20050099635
- Publication date May 12, 2005
- Canon Kabushiki Kaisha
- Osamu Kakuchi
- G01 - MEASURING TESTING
Information Patent Application
Projection exposure apparatus
- Publication number 20040036883
- Publication date Feb 26, 2004
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G01 - MEASURING TESTING
Information Patent Application
PROJECTION EXPOSURE APPARATUS
- Publication number 20030128346
- Publication date Jul 10, 2003
- Eiichi Murakami
- G01 - MEASURING TESTING

Osamu Kakuchi

Person

Patents Grantslast 30 patents

Measurement method, measurement apparatus, exposure apparatus, and...

Apparatuses and methods using measurement of a flare generated in a...

Method of measuring wavefront retardance aberration based on wavefr...

Measuring apparatus, exposure apparatus and device manufacturing me...

Exposure apparatus with interferometer

Aberration measuring method for projection optical system with a va...

Exposure apparatus with interferometer

Projection exposure apparatus

Projection exposure apparatus

Exposure apparatus with interferometer

Depth/height measuring device

Fabri-perot spectroscopy method and apparatus utilizing the same

Patents Applicationslast 30 patents

MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...

APPARATUSES AND METHODS USING MEASUREMENT OF A FLARE GENERATED IN A...

EVALUATION METHOD, EVALUATION APPARATUS, AND EXPOSURE APPARATUS

MEASUREMENT METHOD, MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND...

Exposure apparatus with interferometer

Measuring apparatus, exposure apparatus and device manufacturing me...

Exposure apparatus with interferometer

Projection exposure apparatus

PROJECTION EXPOSURE APPARATUS