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Osamu Kamikanda
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Yokohama, JP
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last 30 patents
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Patent Grant
Plasma processing apparatus using capacitance manometer and pressur...
Patent number
5,311,452
Issue date
May 10, 1994
Tokyo Electron Limited
Takashi Yokota
G05 - CONTROLLING REGULATING
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Patent Grant
Plasma apparatus, and method and system for extracting electrical s...
Patent number
5,147,497
Issue date
Sep 15, 1992
Tokyo Electron Limited
Toshihisa Nozawa
H01 - BASIC ELECTRIC ELEMENTS