Osamu KOMURO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electromagnetic field shielding plate, method for manufacturing sam...
- Patent number 11,690,208
- Issue date Jun 27, 2023
- HITACHI HIGH-TECH CORPORATION
- Ichiro Miyano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromagnetic field shielding plate, method for manufacturing sam...
- Patent number 11,659,700
- Issue date May 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Ichiro Miyano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 10,840,060
- Issue date Nov 17, 2020
- HITACHI HIGH-TECH CORPORATION
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overlay error measuring device and computer program for causing com...
- Patent number 10,545,017
- Issue date Jan 28, 2020
- Hitachi High-Technologies Corporation
- Satoru Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and sample observation method
- Patent number 9,991,092
- Issue date Jun 5, 2018
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image processing device, charged particle beam device, charged part...
- Patent number 9,702,695
- Issue date Jul 11, 2017
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged-particle beam device
- Patent number 9,443,695
- Issue date Sep 13, 2016
- Hitachi High-Technologies Corporation
- Takeyoshi Ohashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image forming device and computer program
- Patent number 9,275,829
- Issue date Mar 1, 2016
- Hitachi High-Technologies Corporation
- Katsumi Setoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus for removing charges developed on a...
- Patent number 9,202,665
- Issue date Dec 1, 2015
- Hitachi High-Technologies Corporation
- Hiroyuki Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, and image analysis device
- Patent number 9,129,353
- Issue date Sep 8, 2015
- Hitachi High-Technologies Corporation
- Masumi Shirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Edge detection technique and charged particle radiation equipment
- Patent number 8,953,855
- Issue date Feb 10, 2015
- Hitachi High-Technologies Corporation
- Hitoshi Namai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Scanning electron microscope
- Patent number 8,704,175
- Issue date Apr 22, 2014
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 8,666,165
- Issue date Mar 4, 2014
- Hitachi, Ltd.
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system
- Patent number 8,304,725
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microstructured pattern inspection method
- Patent number 8,304,724
- Issue date Nov 6, 2012
- Hitachi, Ltd.
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for computing degree of matching
- Patent number 8,285,056
- Issue date Oct 9, 2012
- Hitachi High-Technologies Corporation
- Junichi Taguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern search method
- Patent number 7,941,008
- Issue date May 10, 2011
- Hitachi High-Technologies Corporation
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam system
- Patent number 7,851,754
- Issue date Dec 14, 2010
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microstructured pattern inspection method
- Patent number 7,791,021
- Issue date Sep 7, 2010
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High-accuracy pattern shape evaluating method and apparatus
- Patent number 7,619,751
- Issue date Nov 17, 2009
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning electron microscope
- Patent number 7,439,505
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 7,435,959
- Issue date Oct 14, 2008
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High-accuracy pattern shape evaluating method and apparatus
- Patent number 7,405,835
- Issue date Jul 29, 2008
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for circuit pattern inspection
- Patent number 7,369,703
- Issue date May 6, 2008
- Hitachi, Ltd.
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern measuring method
- Patent number 7,288,764
- Issue date Oct 30, 2007
- Hitachi High-Technologies Corporation
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Grant
High-accuracy pattern shape evaluating method and apparatus
- Patent number 7,230,723
- Issue date Jun 12, 2007
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Microstructured pattern inspection method
- Patent number 7,217,923
- Issue date May 15, 2007
- Hitachi, Ltd.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope
- Patent number 7,214,937
- Issue date May 8, 2007
- Hitachi, Ltd.
- Katsuaki Abe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern measuring method
- Patent number 7,180,062
- Issue date Feb 20, 2007
- Hitachi High-Technologies Corporation
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining depression/protrusion of sample and charged...
- Patent number 7,166,840
- Issue date Jan 23, 2007
- Hitachi, Ltd.
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electromagnetic Field Shielding Plate, Method for Manufacturing Sam...
- Publication number 20220007556
- Publication date Jan 6, 2022
- Hitachi High-Tech Corporation
- Ichiro MIYANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
- Publication number 20180269032
- Publication date Sep 20, 2018
- Zhaohui CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE BEAM DEVICE
- Publication number 20150348747
- Publication date Dec 3, 2015
- Hitachi High-Technologies Corporation
- Takeyoshi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAY ERROR MEASURING DEVICE AND COMPUTER PROGRAM FOR CAUSING COM...
- Publication number 20150285627
- Publication date Oct 8, 2015
- Hitachi High-Technologies Corporation
- Satoru Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140027635
- Publication date Jan 30, 2014
- Hiroyuki Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND IMAGE ANALYSIS DEVICE
- Publication number 20130301954
- Publication date Nov 14, 2013
- Hitachi High-Technologies Corporation
- Masumi Shirai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Scanning Electron Microscope
- Publication number 20130175447
- Publication date Jul 11, 2013
- Hitachi High-Technologies Corporation
- Yasunari Sohda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Processing Device, Charged Particle Beam Device, Charged Part...
- Publication number 20130146763
- Publication date Jun 13, 2013
- Hitachi High-Technologies Corporation
- Hiroki Kawada
- G01 - MEASURING TESTING
Information Patent Application
IMAGE FORMING DEVICE AND COMPUTER PROGRAM
- Publication number 20130141563
- Publication date Jun 6, 2013
- Hitachi High-Technologies Corporation
- Katsumi Setoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE...
- Publication number 20120305764
- Publication date Dec 6, 2012
- Yoshihiro Kimura
- G01 - MEASURING TESTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD
- Publication number 20120153145
- Publication date Jun 21, 2012
- Hitachi High-Technologies Corporation
- Zhaohui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20110057101
- Publication date Mar 10, 2011
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSTRUCTURED PATTERN INSPECTION METHOD
- Publication number 20100314541
- Publication date Dec 16, 2010
- HITACHI, LTD.
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR COMPUTING DEGREE OF MATCHING
- Publication number 20090232405
- Publication date Sep 17, 2009
- Junichi Taguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EDGE DETECTION TECHNIQUE AND CHARGED PARTICLE RADIATION EQUIPMENT
- Publication number 20090226096
- Publication date Sep 10, 2009
- Hitoshi NAMAI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20090041333
- Publication date Feb 12, 2009
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MICROSTRUCTURED PATTERN INSPECTION METHOD
- Publication number 20090020699
- Publication date Jan 22, 2009
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH-ACCURACY PATTERN SHAPE EVALUATING METHOD AND APPARATUS
- Publication number 20080226177
- Publication date Sep 18, 2008
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Microstructured pattern inspection method
- Publication number 20070290697
- Publication date Dec 20, 2007
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
High-accuracy pattern shape evaluating method and apparatus
- Publication number 20070242885
- Publication date Oct 18, 2007
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam system
- Publication number 20070221845
- Publication date Sep 27, 2007
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern measuring method
- Publication number 20070114399
- Publication date May 24, 2007
- Hitachi High-Technologies Corporation
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for circuit pattern inspection
- Publication number 20060269121
- Publication date Nov 30, 2006
- Atsuko Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
High-accuracy pattern shape evaluating method and apparatus
- Publication number 20060145076
- Publication date Jul 6, 2006
- Atsuko Yamaguchi
- G01 - MEASURING TESTING
Information Patent Application
Scanning electron microscope
- Publication number 20060097158
- Publication date May 11, 2006
- Satoru Yamaguchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Microstructured pattern inspection method
- Publication number 20050277029
- Publication date Dec 15, 2005
- Fumihiro Sasajima
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern search method
- Publication number 20050232493
- Publication date Oct 20, 2005
- Norio Satou
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern measuring method
- Publication number 20050211897
- Publication date Sep 29, 2005
- Hitachi High-Technologies Corporation
- Fumihiro Sasajima
- G01 - MEASURING TESTING
Information Patent Application
Method for determining depression/protrusion of sample and charged...
- Publication number 20050151078
- Publication date Jul 14, 2005
- Atsushi Takane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope
- Publication number 20050145793
- Publication date Jul 7, 2005
- Katsuaki Abe
- G06 - COMPUTING CALCULATING COUNTING

Osamu KOMURO

Person

Patents Grantslast 30 patents

Electromagnetic field shielding plate, method for manufacturing sam...

Electromagnetic field shielding plate, method for manufacturing sam...

Scanning electron microscope and sample observation method

Overlay error measuring device and computer program for causing com...

Scanning electron microscope and sample observation method

Image processing device, charged particle beam device, charged part...

Charged-particle beam device

Image forming device and computer program

Charged particle beam apparatus for removing charges developed on a...

Charged particle beam device, and image analysis device

Edge detection technique and charged particle radiation equipment

Scanning electron microscope

Scanning electron microscope

Charged particle beam system

Microstructured pattern inspection method

Method and apparatus for computing degree of matching

Pattern search method

Charged particle beam system

Microstructured pattern inspection method

High-accuracy pattern shape evaluating method and apparatus

Scanning electron microscope

Microstructured pattern inspection method

High-accuracy pattern shape evaluating method and apparatus

Method and apparatus for circuit pattern inspection

Pattern measuring method

High-accuracy pattern shape evaluating method and apparatus

Microstructured pattern inspection method

Electron microscope

Pattern measuring method

Method for determining depression/protrusion of sample and charged...

Patents Applicationslast 30 patents

Electromagnetic Field Shielding Plate, Method for Manufacturing Sam...

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD

CHARGED-PARTICLE BEAM DEVICE

OVERLAY ERROR MEASURING DEVICE AND COMPUTER PROGRAM FOR CAUSING COM...

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM DEVICE, AND IMAGE ANALYSIS DEVICE

Scanning Electron Microscope

Image Processing Device, Charged Particle Beam Device, Charged Part...

IMAGE FORMING DEVICE AND COMPUTER PROGRAM

METHOD OF DETERMINING THE CONCAVITY AND CONVEXITY ON SAMPLE SURFACE...

SCANNING ELECTRON MICROSCOPE AND SAMPLE OBSERVATION METHOD

CHARGED PARTICLE BEAM SYSTEM

MICROSTRUCTURED PATTERN INSPECTION METHOD

METHOD AND APPARATUS FOR COMPUTING DEGREE OF MATCHING

EDGE DETECTION TECHNIQUE AND CHARGED PARTICLE RADIATION EQUIPMENT

SCANNING ELECTRON MICROSCOPE

MICROSTRUCTURED PATTERN INSPECTION METHOD

HIGH-ACCURACY PATTERN SHAPE EVALUATING METHOD AND APPARATUS

Microstructured pattern inspection method

High-accuracy pattern shape evaluating method and apparatus

Charged particle beam system

Pattern measuring method

Method and apparatus for circuit pattern inspection

High-accuracy pattern shape evaluating method and apparatus

Scanning electron microscope

Microstructured pattern inspection method

Pattern search method

Pattern measuring method

Method for determining depression/protrusion of sample and charged...

Electron microscope