Osamu Kuroda

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and apparatus cleaning method
- Patent number 12,087,599
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Hidemasa Aratake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and apparatus cleaning method
- Patent number 11,745,213
- Issue date Sep 5, 2023
- Tokyo Electron Limited
- Hidemasa Aratake
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and processing liquid concentration...
- Patent number 11,615,971
- Issue date Mar 28, 2023
- Tokyo Electron Limited
- Teruaki Konishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 8,978,670
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Junya Minamida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 8,845,262
- Issue date Sep 30, 2014
- Tokyo Electron Limited
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment apparatus, treatment method and storage medium
- Patent number 8,210,190
- Issue date Jul 3, 2012
- Tokyo Electron Limited
- Norihiro Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,862,680
- Issue date Jan 4, 2011
- Tokyo Electron Limited
- Takehiko Orii
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 7,543,593
- Issue date Jun 9, 2009
- Tokyo Electron Limited
- Takehiko Orii
- B08 - CLEANING
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 7,493,904
- Issue date Feb 24, 2009
- Tokyo Electron Limited
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,404,407
- Issue date Jul 29, 2008
- Tokyo Electron Limited
- Takehiko Orii
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Processing apparatus and substrate processing method
- Patent number 7,387,131
- Issue date Jun 17, 2008
- Tokyo Electron Limited
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,332,055
- Issue date Feb 19, 2008
- Tokyo Electron Limited
- Takehiko Orii
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 7,171,973
- Issue date Feb 6, 2007
- Tokyo Electron Limited
- Takehiko Orii
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Liquid processing apparatus and liquid processing method
- Patent number 7,108,752
- Issue date Sep 19, 2006
- Tokyo Electron Limited
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system with positioning device and substrate p...
- Patent number 6,857,838
- Issue date Feb 22, 2005
- Tokyo Electron Limited
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus and method
- Patent number 6,811,618
- Issue date Nov 2, 2004
- Tokyo Electron Limited
- Osamu Kuroda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,769,855
- Issue date Aug 3, 2004
- Tokyo Electron Limited
- Masayuki Yokomori
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transferring apparatus and substrate processing apparatus
- Patent number 6,761,178
- Issue date Jul 13, 2004
- Tokyo Electron Limited
- Osamu Kuroda
- B08 - CLEANING
Information Patent Grant
Apparatus for and method of transporting substrates to be processed
- Patent number 6,368,040
- Issue date Apr 9, 2002
- Tokyo Electron Limited
- Katuki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning and drying apparatus, wafer processing system and wafer pr...
- Patent number 6,171,403
- Issue date Jan 9, 2001
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning and drying apparatus, wafer processing system and wafer pr...
- Patent number 6,068,002
- Issue date May 30, 2000
- Tokyo Electron Limited
- Yuji Kamikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transporting and processing system
- Patent number 6,009,890
- Issue date Jan 4, 2000
- Tokyo Electron Limited
- Satoshi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND APPARATUS CLEANING METHOD
- Publication number 20210114057
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Hidemasa Aratake
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND APPARATUS CLEANING METHOD
- Publication number 20210118704
- Publication date Apr 22, 2021
- TOKYO ELECTRON LIMITED
- Hidemasa Aratake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PROCESSING LIQUID CONCENTRATION...
- Publication number 20200194280
- Publication date Jun 18, 2020
- TOKYO ELECTRON LIMITED
- Teruaki KONISHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20190080938
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Takahiro Kawazu
- G05 - CONTROLLING REGULATING
Information Patent Application
PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM
- Publication number 20140120264
- Publication date May 1, 2014
- TOKYO ELECTRON LIMITED
- Yuichiro Inatomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...
- Publication number 20110311340
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMTED
- Akira Murata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110079252
- Publication date Apr 7, 2011
- TOKYO ELECTRON LIMITED
- Junya MINAMIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT APPARATUS, TREATMENT METHOD AND STORAGE MEDIUM
- Publication number 20090056758
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Norihiro ITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20080210278
- Publication date Sep 4, 2008
- Takehiko Orii
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070105380
- Publication date May 10, 2007
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070105379
- Publication date May 10, 2007
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and liquid processing method
- Publication number 20060137721
- Publication date Jun 29, 2006
- TOKYO ELECTRON LIMITED
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20060130968
- Publication date Jun 22, 2006
- Takehiko Orii
- B08 - CLEANING
Information Patent Application
Substrate processing system with positioning device and substrate p...
- Publication number 20030180127
- Publication date Sep 25, 2003
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processing apparatus and substrate processing method
- Publication number 20030172955
- Publication date Sep 18, 2003
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and method
- Publication number 20030098048
- Publication date May 29, 2003
- Osamu Kuroda
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus
- Publication number 20030024645
- Publication date Feb 6, 2003
- Takehiko Orii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20030010671
- Publication date Jan 16, 2003
- Takehiko Orii
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Transferring apparatus and substrate processing apparatus
- Publication number 20020153098
- Publication date Oct 24, 2002
- TOKYO ELECTRON LIMITED
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20020081181
- Publication date Jun 27, 2002
- Masayuki Yokomori
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus for and method of transporting substrates to be processed
- Publication number 20020037207
- Publication date Mar 28, 2002
- TOKYO ELECTRON LIMITED
- Katuki Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid processing apparatus and liquid processing method
- Publication number 20010049204
- Publication date Dec 6, 2001
- Osamu Kuroda
- H01 - BASIC ELECTRIC ELEMENTS

Osamu Kuroda

Person

Patents Grantslast 30 patents

Substrate processing apparatus and apparatus cleaning method

Substrate liquid processing apparatus

Substrate processing apparatus and apparatus cleaning method

Substrate processing apparatus and processing liquid concentration...

Substrate processing apparatus

Substrate processing apparatus, substrate processing method and sto...

Treatment apparatus, treatment method and storage medium

Substrate processing apparatus

Substrate processing apparatus

Liquid processing apparatus and liquid processing method

Substrate processing apparatus

Processing apparatus and substrate processing method

Substrate processing apparatus

Substrate processing apparatus

Liquid processing apparatus and liquid processing method

Substrate processing system with positioning device and substrate p...

Liquid processing apparatus and method

Substrate processing apparatus and substrate processing method

Transferring apparatus and substrate processing apparatus

Apparatus for and method of transporting substrates to be processed

Cleaning and drying apparatus, wafer processing system and wafer pr...

Cleaning and drying apparatus, wafer processing system and wafer pr...

Substrate transporting and processing system

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND APPARATUS CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND APPARATUS CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND PROCESSING LIQUID CONCENTRATION...

SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM

PLATING APPARATUS, PLATING METHOD AND STORAGE MEDIUM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STO...

SUBSTRATE PROCESSING APPARATUS

TREATMENT APPARATUS, TREATMENT METHOD AND STORAGE MEDIUM

Substrate processing apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Liquid processing apparatus and liquid processing method

Substrate processing apparatus

Substrate processing system with positioning device and substrate p...

Processing apparatus and substrate processing method

Liquid processing apparatus and method

Substrate processing apparatus

Substrate processing apparatus

Transferring apparatus and substrate processing apparatus

Substrate processing apparatus and substrate processing method

Apparatus for and method of transporting substrates to be processed

Liquid processing apparatus and liquid processing method