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Osamu Morita

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  • Hyogo-Ken, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20160093474
    • Publication date Mar 31, 2016
    • TOKYO ELECTRON LIMITED
    • Kiyotaka Ishibashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20140262034
    • Publication date Sep 18, 2014
    • Kiyotaka Ishibashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ANTENNA, DIELECTRIC WINDOW, PLASMA PROCESSING APPARATUS AND PLASMA...
    • Publication number 20130008607
    • Publication date Jan 10, 2013
    • TOKYO ELECTRON LIMITED
    • Naoki MATSUMOTO
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20120267048
    • Publication date Oct 25, 2012
    • TOKYO ELECTRON LIMITED
    • Kazuki Moyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20120160809
    • Publication date Jun 28, 2012
    • TOKYO ELECTRON LIMITED
    • Kiyotaka Ishibashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20090065147
    • Publication date Mar 12, 2009
    • Osamu Morita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate processing apparatus
    • Publication number 20070163502
    • Publication date Jul 19, 2007
    • Toshihisa Nozawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus
    • Publication number 20070137575
    • Publication date Jun 21, 2007
    • Tokyo Electron Limited
    • Tadahiro Ohmi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma processing apparatus, process vessel for plasma processing a...
    • Publication number 20050172903
    • Publication date Aug 11, 2005
    • TOKYO ELECTRON LIMITED
    • Osamu Morita
    • H01 - BASIC ELECTRIC ELEMENTS