Osamu Nasu

Person

Katsuta, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Specimen potential measuring method, and charged particle beam device
- Patent number 9,129,775
- Issue date Sep 8, 2015
- Hitachi High-Technologies Corporation
- Tatsuaki Ishijima
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring displacement between patterns an...
- Patent number 9,000,366
- Issue date Apr 7, 2015
- Hitachi High-Technologies Corporation
- Atsuko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting information of an electric potential on a samp...
- Patent number 8,766,182
- Issue date Jul 1, 2014
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Method for detecting information of an electronic potential on a sa...
- Patent number 8,487,250
- Issue date Jul 16, 2013
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system
- Patent number 8,304,725
- Issue date Nov 6, 2012
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for adjusting optical axis of charged particle radiation and...
- Patent number 8,294,118
- Issue date Oct 23, 2012
- Hitachi High-Technologies Corporation
- Akemi Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting information of an electric potential on a samp...
- Patent number 8,263,934
- Issue date Sep 11, 2012
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Grant
Image processing apparatus for analysis of pattern matching failure
- Patent number 8,200,006
- Issue date Jun 12, 2012
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G01 - MEASURING TESTING
Information Patent Grant
Sample dimension measuring method and scanning electron microscope
- Patent number 8,080,789
- Issue date Dec 20, 2011
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and control method therefor
- Patent number 8,026,482
- Issue date Sep 27, 2011
- Hitachi High-Technologies Corporation
- Muneyuki Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam system
- Patent number 7,851,754
- Issue date Dec 14, 2010
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,714,288
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Grant
Method for measuring dimensions of sample and scanning electron mic...
- Patent number 7,659,508
- Issue date Feb 9, 2010
- Hitachi, Ltd.
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Grant
Image processing apparatus for analysis of pattern matching failure
- Patent number 7,545,977
- Issue date Jun 9, 2009
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for suppressing electrification of sample in charged beam...
- Patent number 5,668,368
- Issue date Sep 16, 1997
- Hitachi, Ltd.
- Katsuhiko Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ion beam neutralization
- Patent number 5,576,538
- Issue date Nov 19, 1996
- Hitachi, Ltd.
- Katsuhiko Sakai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for suppressing electrification of sample in c...
- Patent number 5,466,929
- Issue date Nov 14, 1995
- Hitachi, Ltd.
- Katsuhiko Sakai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for Detecting Information of an Electric Potential on a Samp...
- Publication number 20130284921
- Publication date Oct 31, 2013
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...
- Publication number 20130264479
- Publication date Oct 10, 2013
- Atsuko YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Detecting Information of an Electronic Potential on a Sa...
- Publication number 20120298863
- Publication date Nov 29, 2012
- Hitachi High-Technologies Corporation
- Minoru Yamazaki
- G01 - MEASURING TESTING
Information Patent Application
SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20120119085
- Publication date May 17, 2012
- Hitachi High-Technologies Corporation
- Tatsuaki Ishijima
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ADJUSTING OPTICAL AXIS OF CHARGED PARTICLE RADIATION AND...
- Publication number 20110284759
- Publication date Nov 24, 2011
- Akemi Kono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM
- Publication number 20110057101
- Publication date Mar 10, 2011
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample dimension measuring method and scanning electron microscope
- Publication number 20100038535
- Publication date Feb 18, 2010
- Osamu Nasu
- G01 - MEASURING TESTING
Information Patent Application
Method for Detecting Information of an Electric Potential on a Samp...
- Publication number 20090272899
- Publication date Nov 5, 2009
- Hitachi High-Technologies Corporation
- Minoru YAMAZAKI
- G01 - MEASURING TESTING
Information Patent Application
Image processing apparatus for analysis of pattern matching failure
- Publication number 20090214122
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREFOR
- Publication number 20090140143
- Publication date Jun 4, 2009
- Muneyuki FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle beam apparatus
- Publication number 20080277583
- Publication date Nov 13, 2008
- Hitachi High-Technologies Corporation
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam system
- Publication number 20070221845
- Publication date Sep 27, 2007
- Hitachi High-Technologies Corporation
- Osamu Komuro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image processing apparatus for analysis of pattern matching failure
- Publication number 20070045538
- Publication date Mar 1, 2007
- Hitachi High-Technologies Corporation
- Mitsuji Ikeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for measuring dimensions of sample and scanning electron mic...
- Publication number 20040051040
- Publication date Mar 18, 2004
- Osamu Nasu
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Specimen potential measuring method, and charged particle beam device

Method and apparatus for measuring displacement between patterns an...

Method for detecting information of an electric potential on a samp...

Method for detecting information of an electronic potential on a sa...

Charged particle beam system

Method for adjusting optical axis of charged particle radiation and...

Method for detecting information of an electric potential on a samp...

Image processing apparatus for analysis of pattern matching failure

Sample dimension measuring method and scanning electron microscope

Charged particle beam apparatus and control method therefor

Charged particle beam system

Charged particle beam apparatus

Method for measuring dimensions of sample and scanning electron mic...

Image processing apparatus for analysis of pattern matching failure

Apparatus for suppressing electrification of sample in charged beam...

Apparatus and method for ion beam neutralization

Apparatus and method for suppressing electrification of sample in c...

Patents Applicationslast 30 patents

Method for Detecting Information of an Electric Potential on a Samp...

METHOD AND APPARATUS FOR MEASURING DISPLACEMENT BETWEEN PATTERNS AN...

Method for Detecting Information of an Electronic Potential on a Sa...

SPECIMEN POTENTIAL MEASURING METHOD, AND CHARGED PARTICLE BEAM DEVICE

METHOD FOR ADJUSTING OPTICAL AXIS OF CHARGED PARTICLE RADIATION AND...

CHARGED PARTICLE BEAM SYSTEM

Sample dimension measuring method and scanning electron microscope

Method for Detecting Information of an Electric Potential on a Samp...

Image processing apparatus for analysis of pattern matching failure

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREFOR

Charged particle beam apparatus

Charged particle beam system

Image processing apparatus for analysis of pattern matching failure

Method for measuring dimensions of sample and scanning electron mic...