Osamu Tanigawa

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Kanagawa-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Elevating mechanism, carrier conveying apparatus and heat treatment...
- Patent number 6,902,369
- Issue date Jun 7, 2005
- Tokyo Electron Limited
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elevating mechanism, carrier conveying apparatus and heat treatment...
- Patent number 6,499,933
- Issue date Dec 31, 2002
- Tokyo Electron Limited
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus, method of operating the same and wafer...
- Patent number 6,390,754
- Issue date May 21, 2002
- Tokyo Electron Limited
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for wafer processing
- Patent number 6,302,927
- Issue date Oct 16, 2001
- Tokyo Electron Limited
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of transferring target substrates in semiconductor processin...
- Patent number 5,915,957
- Issue date Jun 29, 1999
- Tokyo Electron Limited
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Elevating mechanism, carrier conveying apparatus and heat treatment...
- Publication number 20030063970
- Publication date Apr 3, 2003
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrier conveying apparatus and heat treatment installment
- Publication number 20010022929
- Publication date Sep 20, 2001
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Elevating mechanism, carrier conveying apparatus and heat treatment...
- Publication number 20010022930
- Publication date Sep 20, 2001
- Osamu Tanigawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS, METHOD OF OPERATING THE SAME AND WAFER...
- Publication number 20010014267
- Publication date Aug 16, 2001
- KENICHI YAMAGA
- H01 - BASIC ELECTRIC ELEMENTS