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Osamu Ueda
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Toyama-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing system, substrate processing apparatus and man...
Patent number
10,496,078
Issue date
Dec 3, 2019
Kokusai Electric Corporation
Kazuyoshi Yamamoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Group management apparatus, substrate processing system and method...
Patent number
9,400,794
Issue date
Jul 26, 2016
Hitachi Kokusai Electric Inc.
Kazuhide Asai
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing system
Patent number
8,560,107
Issue date
Oct 15, 2013
Hitachi Kokusai Electric Inc.
Osamu Ueda
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20230099451
Publication date
Mar 30, 2023
Kokusai Electric Corporation
Norihito SHINOZAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MANAGEMENT APPARATUS, METHOD OF PROCESSING DATA, RECORDING MEDIUM,...
Publication number
20220300192
Publication date
Sep 22, 2022
Kokusai Electric Corporation
Yusuke SAKAMOTO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND MAN...
Publication number
20180210423
Publication date
Jul 26, 2018
Hitachi Kokusai Electric Inc.
Kazuyoshi YAMAMOTO
G05 - CONTROLLING REGULATING
Information
Patent Application
Group Management Apparatus, Substrate Processing System and Method...
Publication number
20140025677
Publication date
Jan 23, 2014
Kazuhide ASAI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Substrate processing system
Publication number
20080086229
Publication date
Apr 10, 2008
Hitachi Kokusai Electric Inc.
Osamu Ueda
G05 - CONTROLLING REGULATING