Osamu Yasunobe

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Layer forming system including cover with support pads, a positioni...
- Patent number 12,228,854
- Issue date Feb 18, 2025
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and ar...
- Patent number 12,226,936
- Issue date Feb 18, 2025
- Canon Kabushiki Kaisha
- Hiroki Takada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Conveyance apparatus, lithography apparatus, and article manufactur...
- Patent number 11,698,584
- Issue date Jul 11, 2023
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,199,773
- Issue date Dec 14, 2021
- Canon Kabushiki Kaisha
- Toshihiro Maeda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Conveyance apparatus, conveyance method, lithography apparatus, lit...
- Patent number 11,073,769
- Issue date Jul 27, 2021
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate holding apparatus and substrate processing apparatus
- Patent number 10,535,548
- Issue date Jan 14, 2020
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus and exposure apparatus and device fabrication method
- Patent number 9,081,308
- Issue date Jul 14, 2015
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure apparatus, and method of manufacturing device using same
- Patent number 8,363,207
- Issue date Jan 29, 2013
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving apparatus and exposure apparatus, and device fabrication me...
- Patent number 8,035,805
- Issue date Oct 11, 2011
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...
- Publication number 20240342965
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- Hiroki Takada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND...
- Publication number 20240242994
- Publication date Jul 18, 2024
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LAYER FORMING SYSTEM INCLUDING COVER WITH SUPPORT PADS, A POSITIONI...
- Publication number 20230152688
- Publication date May 18, 2023
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONVEYANCE METHOD, SUBSTRATE CONVEYANCE APPARATUS, MOLDIN...
- Publication number 20230112924
- Publication date Apr 13, 2023
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...
- Publication number 20220362970
- Publication date Nov 17, 2022
- Canon Kabushiki Kaisha
- Hiroki Takada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE TRANSPORTATION HAND, SUBSTRATE TRANSPORTATION SYSTEM, STO...
- Publication number 20220223461
- Publication date Jul 14, 2022
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVEYANCE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTUR...
- Publication number 20210165319
- Publication date Jun 3, 2021
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, LIT...
- Publication number 20200310257
- Publication date Oct 1, 2020
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20200285147
- Publication date Sep 10, 2020
- Canon Kabushiki Kaisha
- Toshihiro Maeda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190287842
- Publication date Sep 19, 2019
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20110317145
- Publication date Dec 29, 2011
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE USING SAME
- Publication number 20100173236
- Publication date Jul 8, 2010
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DRIVING APPARATUS AND EXPOSURE APPARATUS, AND DEVICE FABRICATION ME...
- Publication number 20090103071
- Publication date Apr 23, 2009
- Canon Kabushiki Kaisha
- Osamu Yasunobe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Osamu Yasunobe

Person

Patents Grantslast 30 patents

Layer forming system including cover with support pads, a positioni...

Substrate processing apparatus, substrate processing method, and ar...

Conveyance apparatus, lithography apparatus, and article manufactur...

Imprint apparatus, imprint method, and article manufacturing method

Conveyance apparatus, conveyance method, lithography apparatus, lit...

Substrate holding apparatus and substrate processing apparatus

Driving apparatus and exposure apparatus and device fabrication method

Exposure apparatus, and method of manufacturing device using same

Driving apparatus and exposure apparatus, and device fabrication me...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...

CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, AND...

LAYER FORMING SYSTEM INCLUDING COVER WITH SUPPORT PADS, A POSITIONI...

SUBSTRATE CONVEYANCE METHOD, SUBSTRATE CONVEYANCE APPARATUS, MOLDIN...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...

SUBSTRATE TRANSPORTATION HAND, SUBSTRATE TRANSPORTATION SYSTEM, STO...

CONVEYANCE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTUR...

CONVEYANCE APPARATUS, CONVEYANCE METHOD, LITHOGRAPHY APPARATUS, LIT...

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

SUBSTRATE HOLDING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

DRIVING APPARATUS AND EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE USING SAME

DRIVING APPARATUS AND EXPOSURE APPARATUS, AND DEVICE FABRICATION ME...