Osamu Yokokawa

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Tsukui, JP

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Patents Grantslast 30 patents

Information Patent Grant
Thermal processing furnace and fabrication method thereof
- Patent number 5,506,389
- Issue date Apr 9, 1996
- Tokyo Electron Kabushiki Kaisha
- Masaru Hidano
- C30 - CRYSTAL GROWTH
Information Patent Grant
Trap device for vapor phase reaction apparatus
- Patent number 5,422,081
- Issue date Jun 6, 1995
- Tokyo Electron Kabushiki Kaisha
- Katsushin Miyagi
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating apparatus
- Patent number 5,328,360
- Issue date Jul 12, 1994
- Tokyo Election Sagami Kabushiki Kaisha
- Osamu Yokokawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating apparatus
- Patent number 5,271,732
- Issue date Dec 21, 1993
- Tokyo Electron Sagami Kabushiki Kaisha
- Osamu Yokokawa
- C30 - CRYSTAL GROWTH