Membership
Tour
Register
Log in
Oscar Hemberg
Follow
Person
Kista, SE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Aligning and focusing an electron beam in an X-ray source
Patent number
9,947,502
Issue date
Apr 17, 2018
Excillum AB
Oscar Hemberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Limiting migration of target material
Patent number
9,564,283
Issue date
Feb 7, 2017
Excillum AB
Oscar Hemberg
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Supply of a liquid-metal target in X-ray generation
Patent number
9,530,607
Issue date
Dec 27, 2016
Excillum AB
Oscar Hemberg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Aligning and focusing an electron beam in an X-ray source
Patent number
9,380,690
Issue date
Jun 28, 2016
Excillum AB
Oscar Hemberg
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Coated X-ray window
Patent number
9,245,707
Issue date
Jan 26, 2016
Excillum AB
Tomi Tuohimaa
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Coated X-ray window
Patent number
9,171,693
Issue date
Oct 27, 2015
Excillum AB
Oscar Hemberg
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Supply of a liquid-metal target in X-ray generation
Patent number
8,837,679
Issue date
Sep 16, 2014
Excillum AB
Oscar Hemberg
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
X-ray window
Patent number
8,681,943
Issue date
Mar 25, 2014
Excillum AB
Hans Hertz
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and apparatus for EUV plasma source target delivery
Patent number
7,838,854
Issue date
Nov 23, 2010
Cymer, Inc.
J. Martin Algots
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
LPP EUV plasma source material target delivery system
Patent number
7,589,337
Issue date
Sep 15, 2009
Cymer, Inc.
Alexander N. Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and arrangement for producing radiation
Patent number
7,239,686
Issue date
Jul 3, 2007
Jettec AB
Magnus Berglund
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for generating X-ray or EUV radiation
Patent number
6,760,406
Issue date
Jul 6, 2004
Jettec AB
Hans Martin Hertz
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for generating X-ray or EUV radiation
Patent number
6,711,233
Issue date
Mar 23, 2004
Jettec AB
Hans Martin Hertz
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ALIGNING AND FOCUSING AN ELECTRON BEAM IN AN X-RAY SOURCE
Publication number
20160247656
Publication date
Aug 25, 2016
Excillum AB
Oscar Hemberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIMITING MIGRATION OF TARGET MATERIAL
Publication number
20150179388
Publication date
Jun 25, 2015
Excillum AB
Oscar Hemberg
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
COATED X-RAY WINDOW
Publication number
20150146866
Publication date
May 28, 2015
Excillum AB
Tomi Tuohimaa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPLY OF A LIQUID-METAL TARGET IN X-RAY GENERATION
Publication number
20140348302
Publication date
Nov 27, 2014
Excillum AB
Oscar Hemberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALIGNING AND FOCUSING AN ELECTRON BEAM IN AN X-RAY SOURCE
Publication number
20130301805
Publication date
Nov 14, 2013
Excillum AB
Oscar Hemberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATED X-RAY WINDOW
Publication number
20130235979
Publication date
Sep 12, 2013
Excillum AB
Oscar Hemberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPLY OF A LIQUID-METAL TARGET IN X-RAY GENERATION
Publication number
20120057680
Publication date
Mar 8, 2012
Excillum AB
Oscar Hemberg
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
X-RAY WINDOW
Publication number
20110317818
Publication date
Dec 29, 2011
Excillum AB
Hans Hertz
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Method and apparatus for EUV plasma source target delivery
Publication number
20080283776
Publication date
Nov 20, 2008
Cymer, Inc.
J. Martin Algots
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LPP EUV plasma source material target delivery system
Publication number
20080179549
Publication date
Jul 31, 2008
Cymer, Inc.
Alexander N. Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for producing radiation
Publication number
20050129177
Publication date
Jun 16, 2005
Magnus Berglund
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for generating X-ray or EUV radiation
Publication number
20020044629
Publication date
Apr 18, 2002
Hans Martin Hertz
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for generating X-ray or EUV radiation
Publication number
20020015473
Publication date
Feb 7, 2002
Hans Martin Hertz
H01 - BASIC ELECTRIC ELEMENTS