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Oshri Amzaleg
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Migdal HaEmek, IL
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End effectors and reticle handling at a high throughput
Patent number
9,618,857
Issue date
Apr 11, 2017
KLA-Tencor Corporation
Igor Volkov
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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last 30 patents
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END EFFECTORS AND RETICLE HANDLING AT A HIGH THROUGHPUT
Publication number
20160252826
Publication date
Sep 1, 2016
KLA-Tencor Corporation
Igor Volkov
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS