TREA

Otto Chen

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  • Hsinchu, TW
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Patents Grantslast 30 patents

  • Information Patent Grant

    Wafer cooling system
    • Patent number 12,033,873
    • Issue date Jul 9, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion collector for use in plasma systems
    • Patent number 11,996,276
    • Issue date May 28, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion collector for use in plasma systems
    • Patent number 11,581,169
    • Issue date Feb 14, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer cooling system
    • Patent number 11,569,099
    • Issue date Jan 31, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer cooling system
    • Patent number 10,872,789
    • Issue date Dec 22, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd
    • Otto Chen
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Grant

    Ion collector for use in plasma systems
    • Patent number 10,553,411
    • Issue date Feb 4, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Preventing dosage drift with duplicate dose integrators
    • Patent number 7,518,129
    • Issue date Apr 14, 2009
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jih-Hwa Wang
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ION COLLECTOR FOR USE IN PLASMA SYSTEMS
    • Publication number 20240290588
    • Publication date Aug 29, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION COLLECTOR FOR USE IN PLASMA SYSTEMS
    • Publication number 20230197424
    • Publication date Jun 22, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER COOLING SYSTEM
    • Publication number 20230139777
    • Publication date May 4, 2023
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER COOLING SYSTEM
    • Publication number 20210104419
    • Publication date Apr 8, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION COLLECTOR FOR USE IN PLASMA SYSTEMS
    • Publication number 20200111651
    • Publication date Apr 9, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER COOLING SYSTEM
    • Publication number 20190096713
    • Publication date Mar 28, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Otto CHEN
    • F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
  • Information Patent Application

    ION COLLECTOR FOR USE IN PLASMA SYSTEMS
    • Publication number 20170076920
    • Publication date Mar 16, 2017
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Otto CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Preventing dosage drift with duplicate dose integrators
    • Publication number 20070257210
    • Publication date Nov 8, 2007
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Jih-Hwa Wang
    • H01 - BASIC ELECTRIC ELEMENTS